Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Process Pump

30 40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

Clean Gas Filter

SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1 2 x TSJ 1/4 Inlet pressure AMG 0.3 MPa Max. flow rate line AFF Pressure drop MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint

Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASD Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS AS-FE KE AS-FG Number of needle rotations Number of needle rotations Number of needle rotations AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FM AS-D AS-T ASP Number of needle rotations Number

Clean Regulator

SRH3010-02 SRH3000-02 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 0 2 4 6 0 100 400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05

Type of Actuation: 5 (3 Position Pressure Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate

Series: 7 (SY7000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: D (Push-turn Locking Slotted Style), A,B Port Thread: 02 (Body Ported

Series: 7 (SY7000), Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: D (Push-turn Locking Slotted Style), A,B Port Thread: 02 (Body Ported: Rc1

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Body Ported 1/4), Thread: T (NPTF)

Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Body Ported 1/4), Thread: N (NPT)

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Body Ported 1/4), Thread: F (G)