Electro-Pneumatic Proportional Valve Series VEF/VEP

(MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

Rotary One-touch Fittings Manifold Series KM

Thead NPT T Applicable tube O.D. F (inch) Part No.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

CE2

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

VXA31/32

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

CE2

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

PFxx-OMA1007

Silencer Compact resin type Metal body type High noise reduction type Part Part number number AN20-02 AN30-03 AN40-04 AN500-06 AN600-10 AN202-02 AN302-03 AN402-04 ANA1-06 ANA1-10 Piping size 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 AMA20#-##C-#-#L# NC AMA20#-##D-#-#L# NO AMA30#-##C-#-#L# NC AMA30#-##D-#-#L# NO AMA40#-##C-#-#L# NC AMA40#-##D-#-#L# NO AMA60#-##C-#-#L# NC AMA60#-##D-#-#L# NO -147No.PF-OMA1007

Digital Pressure Switch

(Analogue output mode) Switch output PNP open collector output type 2 output Max. 80 mA Residual voltage 1 V or less T: Analogue output 1 to 5 V Output impedance 1 k V: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type

VCB

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult SMC regarding other voltages.

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

Smooth Cylinder

For the specifications of D-M9, please refer to SMC Information '02-E500. AC DC Auto switch model Lead wire (m) Load voltage Indicator Wiring (Output) Special function Type Electrical entry Pre-wired connector Applicable load 3 (L) 5 (Z) 0.5 (Nil) Perpendicular In-line 3-wire (Equiv.

PSxx-OMU0008CN

12 V 300 24 V 600 DC(-) 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -23No.PS-OMU0008CN-D [] 3 0.2 [] / / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (63 ) (3 ) () () (26 ) (28 ) (30 ) 3 () 3 -24No.PS-OMU0008CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20C [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [

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ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

CG1

Bore size (mm) Auto switch model 20 25 32 40 50 63 80 100 D-C7/C8 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7 D-B5/B6 BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5/K5 A set of following stainless steel mounting screws is attached. (A switch mounting band is not attached. Please order the band separately.)

Vacuum Module Series ZX

B Both sides Rc G Note) Station 8 only 8 Nil F T (Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX100-K15LZ-EC(-Q) 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 (Dummy spacer) 4 pcs. When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary.

Applicable Auto Switch Model

H HW C 44 52 64 78 92 H' T T' Z Actuator series 50 63 80 100 D-A3lC-4, D-A44C-4 D-A3lC-5, D-A44C-5 D-A3lC-6, D-A44C-6 D-A3lC-8, D-A44C-8 D-A3lC-10, D-A44C-10 58(67.5) 50.5(60) CDA1, CDBA1, CDV3, CDVS, CDLA, CDL1, CNA 69 77 91 107 121 6.5 6.5 7.5 9.5 9.5 40 50 63 80 100 7.5 8.5 10.5 12.5 15.5 M5 X 0.8 X 16 9 10 11 11 11 59(68.5) 51.5(61) 61.5(71) 53(62.5) M5 X 0.8 X 20 65(74.5) 54.5(64) Note