Coolant Valve

Apparent power AC Inrush VNC VNC Holding 1.8 W (without light), 2 W (with light) 4 W (without light), 4.2 W (with light) Non-locking push type, Other (Option) Non-locking push type Power consumption VNH DC Graph (1) VNC2 Pilot Pressure (N.O. type) 0.5 0.6 0.7 Pilot pressure should be within the range of A against the operating pressure.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Rubber Rubber w/ sp.controller VQZ2150lC 200 40 15 or less 20 or less VQZ2151lC Single 2 Position 3 Position 44 15 or less 20 or less VQZ2151SlC 0.7MPa Flow rate (l/min (ANR)) 10 or less 13 or less VQZ2250lC 54 15 or less 20 or less VQZ2251lC SY Double 0.5MPa 58 15

C92

136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

MRHQ

N 40 30 Gripping force N MHY 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa MHW 20 0.3MPa 0.3MPa 10 MRHQ 10 0.25MPa 0.25MPa Misc. 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm DMRHQ20S MRHQ20C 2050 100 Pressure 0.7MPa Pressure 0.7MPa 40 80 0.6MPa 0.6MPa Gripping force N Gripping force N 0.5MPa 30 60 0.5MPa 0.4MPa 20 40 0.4MPa 0.3MPa 0.3MPa 10 20 0.25MPa 0.25MPa 0 20 40

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

CE2

800 25 to 650 50 35 80.5 27 70 46 21 52 24 20 28.5 10 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 32 25 to 800 25 to 650 60 35 98.5 27 85 48.5 23 64 24 20 28.5 13 40 10 15 174 17 26 67 18 11 M10 x 1.25 9 13.5 32 25 to 750 25 to 600 70 40 117.5 32 102 55 23 78 26.5 25 36 15 52 14 17 189 21 30 72 23 13 M12 x 1.75 11 16.5 37 25 to 750 25 to 600 80 40 131.5 41 116 56.5 25 92 35.5 30 36 15 52

CE2

25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators HB HT HC X N A H HA CB W K 2 x plug 2 x P HP (Piping port) 4 x J x E T 4 x counterbore dia.

FSQ seies

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

Electric Actuator / Guide rod Slider

50 CCW CW Stroke[mm] Origin 50mm 10 20 30 40 50 60 CCW CW Stroke[mm] Origin 50mm -50 -40 -30 -20 -10 0 CCW CW Stroke[mm] Origin 50mm -40 -30 -20 -10 0 10 CCW CW Stroke[mm] Origin 50mm -60 -50 -40 -30 -20 -10 CCW CW Stroke[mm] -25- 4.

Rotary Gripper Series MRHQ

0.6MPa 0.6MPa 10 10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.5MPa 0.6MPa, 0.7MPa 20 20 0.6MPa 0.6MPa 0.6MPa 10

XLAQ/XLDQ

26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface Symbol Nil

Digital Flow Switch (Remote type monitor unit)

thickness of the panel is 0.5 to 8 mm (with a waterproof seal: 0.5 to 6 mm) Dimensions of power supply/output lead wire (ZS-40-W) -72No.PF-OMN0012-H Revision history A: Add the product model.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

6 x M5 x 0.8 depth 7 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP16-20 18 58 93 40 36 40 58 22 20 82 65 102 11-/22-MXP16-30 28 70 119 50 42 56 70 29 30 108 75 128 837 Air Slide Table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive guide unit -X42 Be sure to read this before handling.

Low Profile Slide Table Series MXF

moment Static moment L2 A3 W MXH Mp Mr My MXU W W W MXS L1 A2 L3 A6 W L2 A4 MXQ Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

MU

50 63 Size 25 32 40 50 63 Part No.