SMC Corporation of America
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Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

NA FT H2 S + Stroke FX H FZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B B1 B2 D E F FD FT FX FY FZ GA1 GA2 GA3 GB1 GB2 20 18 38 13 26 10 8 16 7 6 51 21 68 10 12 12 8 10 15.5 25 to 300 25 22 44 17 32 12 10 16 7 9 53 27 70 10 12 12 8 10 19.5 25 to 400 32 24 50 22 38 16 14 19 7 9 55 33 72 11 13 13 8 10 21 25 to 500 40 24 60 24 41 18 16 21 9 9 66 36 84

Install an earth leakage breaker*1 suitable to each model for the power supply. Maintain a voltage range within 10% of the rated voltage. (Do not use this product with continuous voltage fluctuations.) *1 Select an earth leakage breaker with a leak current sensitivity of 30 mA. Regarding the rated current, refer to the Applicable Earth Leakage Breaker Capacity.

0.8 10-3-16 16 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room Series 10-, 11-CM2X How to Order Clean Series Mounting style 10 11 Relief type Vacuum type B L F G BZ Basic style Axial foot style Rod side flange style C(D)M2X L 40 10 150 F9BW Head side flange style Boss-cut basic style Boss-cut rod style Flange style RE A B Built-in magnet FZ REC Low speed cylinder Bore size 20 25 32

0.8 10-3-16 16 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room Series 10-, 11-CM2X How to Order Clean Series Mounting style 10 11 Relief type Vacuum type B L F G BZ Basic style Axial foot style Rod side flange style C(D)M2X L 40 10 150 F9BW Head side flange style Boss-cut basic style Boss-cut rod style Flange style RE A B Built-in magnet FZ REC Low speed cylinder Bore size 20 25 32

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

COM B is receiving data: Lights up COM B is having no data to receive: Goes off When input unit is used It is necessary to make power supply for DeviceNet 24 VDC 10%.

V DC Available as an Option Control Signal Power Requirement Less than 1mW Power Supply Voltage 24 V DC 10% Power Consumption 1.8 W maximum Electrical Connection DIN Plug Cable Gland Size Suits 4 ~ 6.5 mm Cable Bleed Air Consumption (at 9 Kgf/cmSupply Pressure) Maximum 10 nl/min Mounting Any Orientation S Y M B O L S H O W T O O R D E R S E R I E S V Y D I M E N S I O N S S E E N E X T

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35

Common external pilotP1 has an M5 screw. Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !

: D-M9BV, D-M9NV, D-M9PV, D-F9WV (mm) B E B Stroke Model Stroke A 100 75 50 30 20 10 100 75 50 30 20 10 MXF8 13.5 6 1 6 14 9 14 MXF12 16 25.1 9.1 9.1 33.1 17.1 17.1 MXF16 21.2 42.3 21.8 11.8 50.8 29.8 19.8 MXF20 23.4 66.7 42.2 18.7 16.7 74.7 50.2 26.7 24.7 ( ): Denotes the values of D-A93.