High Vacuum Angle Valve, XL Series Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)
(unit mm): When the current position is within W-AREA1 and W-AREA2, the WAREA output turns ON. When W-Area 1 < W-Area2, the Parameter ALM of alarm occurs.
G H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7
25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9 19 109 49 5 12.5 10-9-20
Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.
Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o
t ARJ y AR425 to 935 w r ARX t AMR e ARM ARM u y u q i ARP IR-A r o Replacement Parts Component Parts IR Description Material Part no.
TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Connection Applicable model VXP2142-03 VXP2142-04 VXP2152-06 VXP2262-10 Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Size Class B Class H G PAX C D, T G, C S T 3 8 1 2 3 4 S L, Z S L, Z PB
T T 6m T T DataRate 500kbps 100 m 6 m 39 m 250kbps 250 m 78 m 125kbps 500 m 156 m 100 m 121 1%(1/4 W) DeviceNet AWG18 (0.82 mm 2) AWG15 (1.65 mm 2) AWG24 (0.20 mm 2) AWG22 (0.33 mm 2) 120 10%(1 MHz) 120 10%(1 MHz) 1.36 ns/ft(max.) 1.36 ns/ft(max.) 0.13 db/100 ft@125 kHz(max.) 0.25 db/100 ft@500 kHz(max.) 0.36 db/100 ft@1 MHz(max.) 0.29 db/100 ft@125 kHz(max.) 0.50 db/100 ft
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: T (High-pressure Pump)
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: High-pressure Pump
, 521 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts
Meter-out Meter-in y y u u q w e r t q w e r t i i o o !
u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i
10 25 to 300 15.5 25 22 44 17 32 12 10 16 7 9 53 27 70 10 12 12 8 10 25 to 400 19.5 32 24 50 22 38 16 14 19 7 9 55 33 72 11 13 13 8 10 25 to 500 21 40 24 60 24 41 18 16 21 9 9 66 36 84 12 17 17 11 16 25 to 500 21 (mm) Bore size (mm) H1 H2 I IA K MM NA NB NN P S T V W ZZ GB3 H -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5
5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !9 !8 @2 @6 !4 !2 @4 @5 !5 t MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG CXSJM20 to 32 CXSJL20 to 32 CX @5 !6 i u !7 o !5 t r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 D-X 20Data Rod cover Head cover Rod cover Head cover Component Parts No. Description No. Description Material Note Material Note Hard anodized Aluminum alloy Polyurethane q !
10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM
Note 1) 5 10 5 10 D-A9 D-A9V D-M9V 5 Note 1) 5 D-M9 10 Note 1) 10 5 Note 2) D-M9W 10 Note 2) 10 5 Note 2) D-M9WV D-M9AV 10 5 Note 2) D-M9A 10 Note 2) 15 15 D-P3DW Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.
Thi s m anual i s subj ect t o change w i t hout pri or not i ce. ITV2OM00080A 10
(With light: 1.05 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Mass Made to Order (Refer to pages 1004 to 1006 for details.)