Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

0 Section AA' @0 u @8 r y !6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

VCS

VCS 20 1 G The valve will reach high temperatures from high temperature fluids such as steam. Confirm that the valve has cooled sufficiently before performing work. If touched inadvertently, there is a danger of being burned.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Series VCS

H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Note) Tighten within the tightening torque of 0.5 Nm 20%. Changing the entry direction The cable entry direction of a connector can be changed as desired (4 directions at 90 intervals), depending on the combination of a housing r and a terminal block e. 1.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5020 74 115 152 174 16 15 52 74 136 36 132 32 40 40 34.5 196 25 89 128 169 196 20 21 62 89 153 46 149 42 50 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84

Floating Joint

Specifications Model Nominal thread size Allowable axial force [N] Allowable eccentricity U [mm] Rotating angle [] Operating temperature range JT20 M8 x 1.25 220 0.5 2 10 to 70C JT32 M10 x 1.25 560 0.5 2 JT40 M14 x 1.5 880 0.75 2 Operating range Center of sphere e g 2 n a Center of axis r U U g n ti a 2 r e p O Applicable Cylinder Model Applicable cylinder *1 Recommended cylinder Bore size

90

, HNBR 9 Body Aluminum die-casted 799 IR1000-A/2000-A/3000-A Series Construction Basic type (Knob): IR10l0-A r r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000

Suction Filter with Case FH99 Series

View port View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 504 A Suction Filter with Case FH99 Series Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 8 x T 16 (65) N I (34) E F U OUT X H O 62 B U U R S 4 x K OUT OUT Q P IN Differential pressure indicator Differential pressure indication switch G

SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

5 Port Solenoid Valve Series SQ1000/2000

A A B A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

by the load equivalent to impact at the stroke end We: Load equivalent to impact [N] m : Load mass [kg] U: Max. speed [mm/s] g: Gravitational acceleration [9.8 m/s2] We = 5 x 103 x m x g x U Pich moment Me1 = 1/3 We (L + B) 103 Yaw moment Me3 = 1/3 We (L + A) 103 (mm) Average load coefficient Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 Me3 Me1 We We L A L B Cylinder central axis Guide

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 Data 8-9-9 9 Series MXY Table Deflection Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension

PF-OMN0009_C

250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S [] [] P: P: PF3W540S [] P: -39No.PF-OMN0009CN-F () (PF3W504/520/540) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CL2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CL3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CL4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 6 Direct Operated 2 Port for

Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143