)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21
OAllowable voltage fluctuation is 10% of the rated voltage.
Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.
03 0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF
Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled
With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32UNF) R NPT N Needle Valve/Flow Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa
Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS23l1FG-01-01(S)A 1/8" 13.3 24 17.5 36 30.6 29.2 27.5 26.1 13.3 10 (9) AS23l1FG-01-03(S)A 5/32" 8.2 13.9 25.1 10 (10) AS23l1FG-01-07(S)A 1/4" 11.2 10.2 16.4 29.1 20.2 38.7 11 (10) AS23l1FG-01-09(S)A 5/16" 13.2 30.1 21.5 40 14.2 12 (11) AS23l1FG-02-03(S)A 5/32" 7.2 9.6 12 1/8
Display Pressure: 0.7MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: -
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/8, Attachment: None, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.2MPa, Connection Thread: R 1/8, Attachment: None, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/8, Attachment: None, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.2MPa, Connection Thread: R 1/8, Attachment: None, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/8, Attachment: Clear Cover w/Protrusion, is Removable, Option: -
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: Clear Cover w/Protrusion, is Removable, Option: -
Size: 46 (42.5 O.D.), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8)
Size: 46 (42.5 O.D.), Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8)