o

(M5) One touch fitting lot Ve' tube r: :-,1 r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41)) 0.161 (73

o

(M5) One touch fitting lot Ve' tube r: :-,1 r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41)) 0.161 (73

Air Management Hub, SENSOR, DIGITAL AIR FLOW, O24, 300.00000 lb

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5

CXT

(Detroit) 2990 Technology Drive Rochester Hills, Ml 48309 Tel: (248) 299-O2O2 FAX: (2a8) 293-3 SMC Pneumatics Inc. (St. Louis) 4130 Rider Trail North Earth City, MO 63045 Tel: (314) 209-0080 FAX: (314) 209-0085 SMC Pneumatics lnc. (Charlotte) 5029-8 West W.T. Hanis Blvd. Charlotte, NC 28269 Tel: (704) 597-9292 FAX: (704) 596-9561 SMC Pneumatics Inc. (Phoenix) 2001 W.

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

NVEPA|VEFseies

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

3M/SMseries

(Detroit) 2990 Technology Drive Rochester Hills, Ml 48309 Tel: (248) 299-O2O2 FAX: (2a8) 293-3 SMC Pneumatics Inc. (St. Louis) 4130 Rider Trail North Earth City, MO 63045 Tel: (314) 209-0080 FAX: (314) 209-0085 SMC Pneumatics lnc. (Charlotte) 5029-8 West W.T. Hanis Blvd. Charlotte, NC 28269 Tel: (704) 597-9292 FAX: (704) 596-9561 SMC Pneumatics Inc. (Phoenix) 2001 W.

Air Management Hub, SENSOR, DIGITAL AIR FLOW, O24, 300.00000 lb

Air Management Hub, SENSOR, DIGITAL AIR FLOW, O24, 770.00000 lb

Air Management Hub, SENSOR, DIGITAL AIR FLOW, O24, 770.00000 lb

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

Clean Room Regulator/Fluoro Resin Type Series SRF30

) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

E,R.L.

PSI Fanqe Suffix Adder A B NPTF Kt0 0-160 G (STDI 1 . 5 1.375 t6 K12 0-160 G (STD) 1.750 Kr3 0-30 2 1.750 th Kl8 o-60 1.750 U. K19 0-100 1.75 U1 K2e 0-30 1.5 1.375 \b Jet o-60 '1.5 1.375 ls All SMC gaug6 ars scal6d in PsyKgt/cml Precautions N4C5000, 5500, 6000 NAL Series (lnstallation) (Auto Drain) (lnstallation) OFlush piping before installation.

q"s

V, 30 mA PNP ooen colleclor outout: l\,4ax. 30 mA :: W Lineariiy Within 11% (full sDan Hysleresis Within 0.5% (full span) Repeatability Within 10.5% (fullspan Sensitivity Wilhin 0.2% (full span) TemDerature characteristics Wilhin 10.12% (f ull span)/'C Output p.

NAIV

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

NCRAI seies

W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Compressed Air Preparation Filter

Unit: Nm Recommended Torque Connection thread 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 48 to 50 48 to 50 * After tightening by hand, use a tightening tool to tighten an additional 1/6 turn. 2. Select according to the maximum flow rate of the system. 2.

Rotary Table

In the actual setting, adjust them after confirming the auto switch operating condition. 30 - Maintenance and Inspection For most suitable use of rotary table, regular inspection is required according to the operating condition.