Smooth Cylinder/Low Speed Cylinder

, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed above are also available.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Without auto switch: 10C to 70C With auto switch: 10C to 60C (With no condensation) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot bracket Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Piston speed Stroke length tolerance +1.0 0 50 to 400 mm/s Mounting style Grease Particle generation grade (Refer to front matter 13 for details.)

SMC Pneumatic Clean Series

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Sine Cylinder Series REC

Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375 387.5 400

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

pressure 1.0 MPa 0.7 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature JIS Symbol Double acting, Double rod Rubber bumper (Standard) Cushion Female thread Rod end thread JIS Class 2 Rod end thread tolerance +1.4 0 Through-hole/Both ends tapped (Common) Stroke length tolerance Mounting Piston speed 50 to 500 mm/s 20 to 400

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Angle Seat Valve /

200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

Manifold Specifications

/5(R) port) (Pitch) C6: MAX. 6 C8: MAX. 6.5 G: 300 mm H: 600 mm (Mounting hole) 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model C6: T0604 C8: T0806 (Lead wire length) (mm) Stations 2 3 77 49 96 68 20 419 391 L1 L2 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

In-line Air Filter

500 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC77 12 0.3 MPa 30 Pressure drop [kPa] 0.1 MPa 20 0.5 MPa 10 0.7 MPa 0 0 200 400 600 Flow rate [L/min (ANR)] 4 ZFC Series Construction Component Parts Replacement Bracket Part No.

Large blow and

Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 1,600 700 ---6 ---6 Discharge flow rate Discharge flow rate 1,400 Vacuum pressure [kPa] Vacuum pressure [kPa] 600 Vacuum pressure Vacuum pressure ---5 ---5 1,200 500 ---4 ---4 1,000 400

AMD

B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

RB/RBL/RBQ

Selection of applicable model 78.5 94.2 110 173 188 236 393 Selection of applicable model According to Data D , the tentatively selected RB2015 satisfies Me = 260 kg < 400 kg at = 0.3. Ultimately, it will result in an operating frequency of n20 < 25, without causing a problem.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 to 60C Ambient & fluid temperatures 50 to 400 mm/s Piston speed Rubber bumper on both ends Bumper Non-lube Lubrication +1.5 0 mm Stroke length tolerance Manual type Table rotation system Right, left, free repetetive rotation Table rotation direction

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum speed (mm/s) 100 All strokes 200 300 400 600 800 500 Stroke (mm) CX (1) (2) (3) 8 Selection graph D(4) (5) (6) (7) 12 to 40 -X Horizontal Mounting 20Data W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.