HRX-OM-T002

Ventilation Expansion E Temp. sensor (Return) TS valve A FAN Tank Expansion E valve B Customer's machine Temp. sensor (Ref. discharge (Heat load) TS Level switch Fluid level gauge Press. sensor (Ref. low press.)

HRX-OM-R026

Ventilation Expansion E Temp. sensor (Return) TS valve A DC inverter FAN Tank Expansion E valve B Customer's machine Temp. sensor (Ref. discharge (Heat load) TS Level switch Fluid level gauge Press. sensor (Ref. low press.)

80

D 200 VAC 1.0 1 Size 1 (VDW1) 4 One-touch fitting 1.6 E 230 VAC 1.0 Z Other voltages Brass M5 1.6 1.0 Stainless steel M5 For other special options, refer to page 462. 1.6 A B C D E F G H J 1.6 48 VAC M5 2.3 220 VAC Special voltage 3.2 240 VAC Resin (PPS) (With bracket) 1.6 24 VAC 4 One-touch fitting 2.3 12 VDC 3.2 Deionized water (Seal material: FKM) 1.6 Oil-free VCH 6 One-touch fitting 2.3

HRX-OM-S004

Ventilation (H/X inlet) Ball tap Expansion TS E Circulating fluid return port valve A Level switch Expansion Fluid level gauge valve B Customer's E machine Temp. sensor (Ref. discharge (Heat load) Press. sensor (Outlet) TS PS TS Heat Temp. sensor Circulating fluid outlet port exchanger (Outlet) Press. sensor (Ref. low press.)

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For manifold type 31, S31, 32, S32 Body option 5 port 0: Pilot valve individual exhaust for the pilot valve 3: Common exhaust type for main and pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

Plug-in/Plug Lead: Single Unit

q w q w e VQC SQ VQ0 VQ4 VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A

Clean Room Rodless Cylinder Series CYP ø15, ø32

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Specification 1.1 AC servo motor 1.1.1 How to order L E J S 100 T9 B 500 T X400 Lead [mm] Motor type Stroke [mm] H 50 200 200 T9 AC servo motor to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

2/3 Port Valve for Various

Fuel oil (up to 60C) Fuel oil (up to 100C) B PTFE EPDM Brass or BC6, Copper J A H A H A H D N Note 2) FKM EPDM FKM NBR FKM EPDM PTFE FKM FKM EPDM PTFE(FKM) PTFE(FKM) NBR H Note 1) Steam system (Steam) S Q B Steam system (Boiler water) Steam system (Condensate) Insulation oil Naphtha Parachloroetylene Brake oil Water (up to 99C) G, J E P A H A H A H B J D, E N, P If using for other fluids

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

4 r e !0 !1 q i !2 o !3 y Component Parts No.

Speed Controller: Standard Type Series AS In-line Type

0 i y r u e t r i !0 q y !3 !2 !1 o w !3 e t w o u !4 y q !2 AK ASS ASR ASF Meter-in type M5 type U10/32 port AS3210-02 Component Parts No. Description Material Note No. Description Material Note Body A O-ring Zinc alloy NBR q i Body B O-ring Electroless nickel plated Brass NBR w o Needle Bushing Electroless nickel plated Brass PBT e !

2/3 Port Valve

FPM/EPR e Stainless steel, FPM Stainless steel, Brass NBR Note 1) Dew point: 10C or less. Note 2) 50cSt or less. Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.

Stopper Cylinder

0 w q e r t u !

PSxx-OMT0001CN

OUT (6)OUT (0.3 Nm) -63No.PS-OMT0001CN-E 5 -64No.PS-OMT0001CN-E 5 ,,, (), (100 kPa200 kPa) (42 ) ON (42 ) ON(OFF) (35 ) ON (NPN/PNP) (100 kPa200 kPa) (28 ) ISA3 2 -65No.PS-OMT0001CN-E 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2 (OUT2) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) -66No.PS-OMT0001CN-E 5 [ON/OFF] [] () [kPa] -67No.PS-OMT0001CN-E

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.