Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

ITV

(mm) 10 9 8 7 6 5 4 3 2 Manifold stations n L1 L2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 14-8-10 11 Compact Electro-pneumatic Regulator Series ITV0 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Air Supply Handling Caution 1.

Model Selection 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 VX3 2.5 VXA Pressure (MPa) 2.0 VN 1.5 LVC LVA 1.0 LVH 0.5 LVD 0 20 40 60 80 100 120 140 LVQ Temperature (C) 1/8", 3/16", 1/4", 4, 6 tubing 3/8", 10 tubing 1/2", 12 tubing 3/4", 19, 1", 25 tubing LQ LVN TI/ TIL PA PAX PB 17-5-99 4 Series LQ1 Dimensions

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

VNC

Solenoid Model Port size Flow characteristics Weight (kg) Air operated External pilot Solenoid Orifice size (mm) Model Threaded Note) Flange Av x 10-6 m2 VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 30 32 36 95 120

VND

25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120

SQ1000/2000

DG DG Uni-wire System Uni-wire H System S-LINK System Send unit: SD-120 Send unit: SD-H2 S-LINK controller: SL-CU1 16 outputs 16 outputs 16 outputs (Type SDJ1) 8 outputs (Type SDJ2) 16 Series SQ1000 Kit (Serial Transmission Kit) S Type SDV Mitsubishi Electric Corporation CC-LINK System Type SDR1, SDR2 OMRON Corporation CompoBus/S Type SDQ DeviceNet Terminal block LED description Note

VQ7-6/7-8

Mounting bolt M5 X 120 with SW M5 X 130 with SW M5 X 135 with SW M5 X 140 with SW M5 X 145 with SW Size Spacers Main exhaust back pressure check plate Throttle valve spacer Release valve spacer Spacer 1 Individual supply spacer Individual exhaust spacer R1, R2 individual exhaust spacer Reverse pressure spacer Residual pressure release valve spacer Individual supply spacer with residual

ZP

conditions X: Not suitable Solvent resistance (Benzene, toluene) X Characteristics Oil resistance gasoline Oil resistance benzol Operating temperature range (C) Base resistance Acid resistance Ozone resistance Abrasion resistance Durometer HS (5) Weatherability Waterproof Material 50 40 60 60 50 50 NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon rubber 0 to 120

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Gripper Mounting Angle: 120 (120 Degrees), Changer Specification: E (With main plate and tool plate)

Related Products

AC60* 98 101 131 Proof pressure 225 psi (1.5 MPa) 60 (0.4) Operating pressure range 30 to 150 psi (0.2 to 1 MPa) A1 A2 A3 45 (0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122 37 61 1(P) to 2(A) Effective area (mm2) 132 24 141 49 76 2(A) to 3(R) 15 (0.1) 1.14 (0.64) 1.63 (0.74) 2.21 (1.00) 4.19 (1.90) 4.06 (1.84) Weight manual/solenoid lb (kg) 0 15 30 45 60 75 90 105 120

Series 10-MGF ø40, ø63, ø100 Guide Table

X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Information

CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Slider Type/Ball Bushing Bearing

105 M10 x 1.0 40 16.5 25.5 117 130 10 10.5 29 20 28 Rc 1/8 RB1411 60 M6 x 1.0 0.5 100 130 105 1.0 M14 x 1.5 50 16.5 25.5 127 130 10 12.5 49 40 22 DRc 1/8 70 M8 x 1.25 0.5 120 160 121 1.0 M20 x 1.5 60 18.5 28.5 157 149 12 13.5 52 42 33 RB2015 Rc 1/4 90 M8 x 1.25 1.0 140 190 159 1.0 M20 x 1.5 84 20.5 35.5 187 194 12 12.5 51 36 35 -X PA dimensions are for split from center.

15

73 14 28 87 30 1 CY1S20-Z M10 x 1 RJ1007LN 40 70 90 90 4.5 9 73 16.5 87 18.5 37 106 M6 x 1 Rc1/8 NPT1/8 G1/8 38 1.5 CY1S25-Z M14 x 1.5 RJ1412LN 73 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 99 90 4.5 9 16.5 96 18.5 37 106 42 1.5 CY1S32-Z M20 x 1.5 RJ2015HN 91 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 5.5 11 18.5 116 18.5 37 128 50 3 CY1S40-Z M20 x 1.5 RJ2015LN M8 x 1.25 Rc1/4 NPT1/4 G1/4 65 105 142 120

Process Valve

8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120

Coolant Valve

port 12(P1), 10(P2) Port size: refer to table below F H (Air operated) J (External pilot solenoid) Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P2 P1 E D 32 A K B C Main port 1(A) [Back side 2(B)] Port size: refer to table below Main port 1, 2 Pilot port 12(P1), 10(P2) A B K C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120