Cylinder with Lock

100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 [mm] Bore size h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to

Modular/F.R.L. Units Series AC

55 55 72.5 77.5 A2 43 57 57 75 80 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model A1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series

Modular F.R.L. Unit

Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5 93 98 98 L2 48 61 76 76 99 104 124 124 129 L2 61 76 76 99 L3 43 57 57 75 L3 57 74 74 95 L3 57 74 74 95

JIS Standard Hydraulic Cylinder

75 60 31.5 30 20 24 M30 x 1.5 A M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M39 x 1.5 Note) The pin, keeper plate and cap bolt are included with a double knuckle joint.

MXS Series Air Slide Table

75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16 on P. 60 for one with shock absorber as symmetric.

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Battery-less

Check the SpeedWork Load Graph on page 75.

ZP

EPR ZPT40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT80HBNJ25-B01-A18 ZPT 80HBNJ50-B01-A18 75-B01-A18 ZPT100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 268 289 535 575 620 659 719 759 804 843 127 147 168 143 163 201 208 228 249 231 Misc. 40 50 63 80 100

15

Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 40 50 60 70 80 0 10 20 30 40 50 Work load [kg] Work load [kg] These graphs are examples of when the standard motor is mounted.

7ND9071en

C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/K05 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/IK06 -40 to +60 C

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

CL

100 20 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 25 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 32 17 35 12.5 77 90 102 115 140 165 190 25 37.5 50 75 100 125 40 17 46 Over 301 stroke: Long stroke. 9-2-22 21 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Axial Foot Style (L) Rc BQ locking port for pressurizing (Plug cap with breathing port at spring

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 75 15 85 75 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 75 + 40 90 + 40 15 + 40 75 + 40 80 + 40 85 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

High Vacuum Angle Valve

Maintenance Parts Table 1: Seal Material Symbol -XN1 -XP1 Kalrez -XQ1 -XR1 Chemraz -XR2 -XR3 VMQ 1232-70 -XS1 FKM for Plasma 3310-75 -XT1 ULTIC ARMOR -XU1 Symbol Seal material Compound no.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25 depth 14 9.5 depth 6 25 30 85 16.5 13 16 6.6 54 113 35 65 100 26.5 70 130 65 30 35 109 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 32 35 100 19 16 16 6.6 60 118 35 80 106 29 80 135 73 35 40 129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.