Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

AMD800/900/1000 SGP-E, SS400 SGP-E, SS400 No. Description AMD801/901 SGP-E, SS400 Filter case Cover q w AMl SS400 Replacement Parts Related poroducts Part No. AMD800 AMD801 AMD900 AMD901 AMD1000 Material No. Description NBR 63174 63174 63174 3 pcs. 63174 3 pcs. 63174 5 pcs. Element Packing e r 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs.

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 125mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 125mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

AMF

AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMG No. Description AMF801/901 SGP-E: SS400 Filter case Cover q w AFF SS400 Replacement Parts AMl Part No. AMF800 AMF801 AMF900 AMF901 AMF1000 No. Description Material Related poroducts NBR 63271 63271 63271 3pcs. 63271 3pcs. 63271 5pcs. Element Packing e r 63148 63148 63148 3pcs. 63148 3pcs. 63148 5pcs. O.D.112 X I.D.90 X T3 5 pcs.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

VXA21/22

The right side of the common port provides plug. 4.1-75 VVXA31/32 Dimensions Stations 2 3 4 5 6 7 8 9 10 Model L L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model M 45.5 50.5 N 69 76 K 6 9 G 24 25 H 30 40 J 36 46 F 33 34 C 9 10 D 22 24 E 59 66 B 20 22 A 40 44

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Fluoropolymer Tubing Variations

0.4 0.1 0.05 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature C How to Order 1.2 Metric size Max. operating pressure MPa D 20 TLM0425 N 1.0 0.8 E Tubing designation Length per roll Symbol 10 20 50 100 2S 0.6 F Type Length 10 m 20 m 50 m 100 m 2 m 0.4 Color indication G Roll Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black

VP3145/3165/3185

Coil rated voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 1 2 3 Electrical entry 110 to 120 VAC, 50/60 Hz T E H G Grommet (Lead wire: 300 mm) Grommet (Lead wire: 600 mm) 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC Grommet terminal Conduit terminal D With connector DO Without connector L With lead wire LN Without lead wire LO Without connector M With lead wire MN Without lead wire 7 240 VAC, 50/60