C95

9 i @2 q r y #0 #9 $1 w A B $0 #3 @6 #8 @8 $3 #4 #5 $5 !0 u @5 !6 @1 !1 $5 o $7 e Section B (Tie-rod for unit attachment) Section A (Release piston bushing) #1 !2 !2 !2 100 80 63 50 40 32 80, 100 Description Material Qty. Note Component Parts No. No.

Digital Flow Switch

0 to 10 V Output impedance: 1 k FS: Analog output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 PNP + External input selected PF3A7H--ES/FSNPN + External input selected PF3A7H--CS/DSBrown DC(+) Brown DC(+) Load Main circuit Main circuit Black OUT Black OUT Load 24 VDC 24 VDC U U White External input White External input U U Blue DC() Blue DC() Max. load current: 80 mA, Internal

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note2) A (set) side energization : A light (orange) illuminates, B-(reset) side energization : B light (green) illuminates.

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

VS7-6

A B A B A B A B AXT511 -3 (V) AXT511 -4 (V) 24V DC 12V DC AXT511 -1 (V) AXT511 -2 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.020 0.015/0.01 VQ Rated voltage (V) Inrush current (A) Holding current (A) Allowable voltage (V) 0.075 0.15 VQ4 85 to 110% of rated voltage Insulation Class B (130 oC) or equivalent VQ5 A: With 2-M4 X 46 bolts for 2 position valve, B: With

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 U side D side (L4) Applicable connector: 26 pin MIL type

-fl Seies

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Cylinder with Lock Series CLS

Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5

Membrane Air Dryer

O S L H o t (L) A M B C P (H) OUT IN Q N N D R (J) OUT (K) F E S G 9 (IDG3, 5 only) (Maintenance space 100 mm or more) With float With drain guide Port size A B C D E type auto-drain F G H J K L M N P Q R S Model T U IDG3V3, 3HV3, 5V3, 5HV3 IDG10V3, 10HV3 IDG20V3, 20HV3 1/4, 3/8 284 202 41.5 10 119 144 174 97 5.5 12 73 173 180 237 262 93 30 24 5.5 29 67 3.2 192 1/8, 1/4 254 55 14 208 201

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

NCRBIBwserbs

R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Note Bracket B and the bracket assembly make up one set. DOWN OUT1 U P SET ZS-31-A Bracket Note) Mounting screws are not included.

C95

GD GC EE SW EE SW1 KK WA WA WB B D B ??

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !