TABLE OF CONTENTS V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.
Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.
V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication
A B A B A B A A A B For the I/O Unit part number mounted, refer to the following pages.
Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -92No.PF-OMX0002-B Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30
detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.
(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)
L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power
guide type) 63 50 Mounting position A 335.5 290.5 B 138.5 123.5 Operating range l Note) 11 11 A B 100 Solid State Switches D-F9/3 Wire, 2 Wire (Direct Mount) Series MY1 D-F9N (V), D-F9P (V), D-F9B (V) Applicable cylinder series 16 10 20 25 32 40 50 63 80 100 Bore size (mm) MY1B (Basic) G G G MY1M (Slide bearing) G G MY1C (Cam follower guide) G G MY1H (High precision guide) G G G Auto switch
Signal Details 1 24 V 24 VDC (US1): OUTPUT 2 Internal Bus B Internal Bus B 3 0 V 0 V (US1) 4 Internal Bus A Internal Bus A : Do not turn on the power supply. Wireless adapter side connector: M8 4-pin A-coded (Plug) Connector Pin No.
V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page
Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.
5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.
(Inch) 1 /4 3/8 1/8 5/32 1/4 5/16 M5 Pressure Specifications VP4 V V V VQZ1000 V VQZ2000, 3000 Series A, B port 2 position single 2 position double 3 position V V V VQZ2000 Metal seal only VQZ3000, 3 position 0.15 to 0.7MPa 0.1 to 0.7MPa V V V V VQZ3000 External pilot pressure range VQ Note) Millimeter sizes of One-touch fittings (Cl) are also available.
V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.
, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 2-wire 24 V 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire IC circuit 3-wire (NPN) Terminal conduit 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color
NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire
NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire
V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication
size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW Auto switch model 40, 50 A B Hs 9 7 4.5 7.5 44 50 Symbol Bore size (mm) 40 50 8 Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection HS Reed switch D-A9 V Solid state switch D-F9 V D-F9 WV A B 12 HS A B 16, 20, 25 HS A B 32, 40, 50 (mm) D-F9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12