HRX-OM-O021

flow (For water-cooled type) 30 HRS050-W*-20-* Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described in fig.8-4.

Auto Switch Guide

screw M5 x 0.8 x 16 l 1.

NCA1

1 3/8 2.34 2.72 4.25 3.74 5 53/64 Single Rear Clevis Type NC A1C (MP4 Mounting Style) (in) Bore (in) MM KK A AA B C CB CD D DD E EA EE F G J L LR M WF XD Y LF P ZD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 3/4 1/2 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 3/4 5/8 1/2 1 5 3/4 1.71 3 5/8 2.36 6 1/4 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 3/4 5/8 1/2 1 5

Air Slide Table Series MXW

Contents Applied part Grease pack part no. 8 12 16 20 25 GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) MXW8-PS MXW12-PS MXW16-PS MXW20-PS MXW25-PS Guide Set of nos. above !9, @0, @1 DGR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Cylinder -X Seal kit includes !9, @0, @1, Order the seal kit, based on each bore size.

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

MHF2

Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 0 80 60 40 20 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable

MHF2

60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 80 60 40 20 0 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers

45

Option When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations at maximum) Connector assembly for L and M typesRefer to page 1-6-8.

CHKD/CHKG

CHDKDB Bore size Port thread type Rod end thread type Stroke M9A(V)L R With auto switch (Built-in magnet) Water resistant cylinder Water resistant solid state auto switch with 2-color display R V NBR Seal (Nitrile rubber) FKM Seal (Fluororubber) 20 to 100 M9A(V)L Some of the parts are different from the dimensions of the basic type. Refer to Best Pneumatics No. 2-1 for details.

Digital Flow Switch (Integrated display type)

to 200 50 to 500 L/min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal

PFxx-OMY0005

(Displays 0 when the value is below 10 L/min) 40 to 2100 L/min 20 to 1050 L/min (Displays 0 when the value is below 40 L/min) 2.0 0 to 2%F.S. (Displays 0 when the value is below 20 L/min) 60 to 2100 L/min 30 to 1050 L/min (Displays 0 when the value is below 60 L/min) 3.0 0 to 3%F.S.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

860 Lock position 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 Holding force (Max.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

HRX-OM-M005

water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc 1/2 (single system for channels 1,2) Power supply 3-phase 50/60Hz AC200/200 to 208V10% Rated flow*10 L/min 20 20 Max. operating current A 52 Main breaker size A 60 Temperature fuse operating temperature C 98 98 Dimensions*

MHY2/MHW2

Holding point L (mm) 120 80 160 200 20 40 60 Holding point L (mm) 80 0 20 40 60 Holding point L (mm) 80 100 120 MHW2-25D MHW2-40D MHZ2 160 50 Pressure 0.7MPa Pressure 0.7MPa 140 MHZJ2 0.6 0.6 40 120 Holding force (N) Holding force (N) 0.5 0.5 MHQ 100 30 0.4 0.4 80 0.3 MHL2 0.3 20 60 0.2 0.2 40 10 MHR 20 0 20 40 60 Holding point L (mm) 100 80 20 40 60 Holding point L (mm) 80 100 120 140 160

HRX-OM-R005

0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water

VDW

VCL Standard Option t 1 Body Brass (C37) Stainless steel VCS 2 Tube assembly Stainless steel 3 Coil assembly VCW y 4 Armature assembly FKM, EPDM Stainless steel, PPS, NBR 5 O-ring (Body) FKM, EPDM NBR 6 Return spring Stainless steel q 7 Cover SPCE 8 Clip Stainless steel 245 Series VDW10/20/30 Dimensions VDW11-l G W VDW21-l G W 22 20 Lead wire l Approx. 300 Lead wire l Approx. 300 20

Programless controller Step motor (servo 24 VDC)

Refer to the table below for the speed and the acceleration LEP6J LEP6K LEP10 (L)J LEP10 (L)K Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] [mm/s2] [mm/s] [mm/s2] 0 20 200 10 200 20 200 10 200 1 30 300 15 300 30 300 15 300 2 40 400 20 400 40 400 20 400 3 50 500 30 500 50 500 30 500 4 60 600 40 600 75 600 40 600 5 70 700 50

MXS

9 3.11-27 Air Slide Table (Symmetric Style) Series MXSlL How to Order MXS 12 50 F9N S L AS Air slide table Symmetric style Number of auto switches 2 1 n S n Bore size (Stroke: mm) Auto switch Without auto switch 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75