Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Electric Actuator

LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric.

HEC-OM-S008

sum CR (H) (L) Thermo-con STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) COM indicates communication command.

Soft Start-up Valve

Safety Instructions 2~14 2. Application 15 3. Specifications 15~16 4. How to Order 17~21 5. Construction / Parts List 22~23 6. Assembly of Optional Parts 24 7. Working Principle 25 8. Trouble Shooting 26 9. Disassembly Drawing 27 10. Dimensions 28~33 -1- These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Stability of suction position,

Core sheet XT661 D Seal Dimensions t d Material: Core sheet Rolled steel Seal NBR Part no. d B H Sales unit ZPNA-M6 M6 x 1 8 3 Dimensions 10 pcs. ZPNA-M12 M12 x 1.25 19 7 ZPNA-M14 M14 x 1 19 5 ZPNA-M16 M16 x 1.5 22 6 Part no. t D Applicable thread size ZP3EA-SW6 1.3 14 M6 x 1 ZP3EA-SW10 1.6 15.5 M10 x 1 ZP3EA-SW12 2 24.3 M12 x 1.25 ZP3EA-SW16 2 28 M16 x 1.5 H B 2 pcs.

HRX-OM-W032

This function resets the accumulated operation time. 5.16 14 Anti-freezing Circulating fluid is protected from freezing during winter or night.

KA

Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 X 0.8 M6 X 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 17 KAH04-M5 M5 X 0.8 M6 X 1.0 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 18.5 13.5 KAH04-U01 5 14 10 10 16 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 18.5 KAH06-M5 M5 X 0.8 M6 X 1.0 15 14 4 4 11.5 3 10 KAH06-M6 19 1 8 14.5 KAH06-U01 5 12 6 19.5 17 1 4 13 17 14 12 KAH06

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

Air Combination

. -14- 3-5.

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator light 50 11 (12.5) 11 (12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 X PE PE X 32 41.5 30.5 27 R1

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

H (Hexagon width across flats) (Hexagon width across flats) D3 D3 L5 A1 A2 A1 D1 L5 D1 A2 T T Inch Size Weight (g) L4 (1) L5 (1) A1 (2) A2 (2) M1 d T H D1 D2 D3 L1 L2 L3 Model Max.

Antistatic One-touch Fittings Series KA

(mm) H (Hex.) M5, M6 D L A M Part No.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions

ZSE1/ISE1

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator

PSxx-OMT0001CN

M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 8 6 5 m46 14 6 5 m 0.50 mm 1.00 mm(26 ) 113 g() CE (EMC RoHS ) 120 2F 3 57 G 20 280 H 20 480 3 428 5OUT2 6OUT2 7 8 -16No.PS-OMT0001CN-E 2 () (2 ) X276 /(13 )2 -17No.PS-OMT0001CN-E 2 ON 150 kPaON3(50 kPa)ON 1.5 F42.5 GH64 150 kPa (100 kPa200 kPa) 80 kPa220 kPaOFF (67 ) ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m ON [mm] ON [mm] ON

energy saving effect

Refer to "Operation at low ambient temperature or low circulating fluid temperature" (page 186-1) for the concentration of the ethylene glycol aqueous solution. 4 h 2 h 1 h 5.

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Bore size (in) 1.50 2, 2.50 3.25, 4 CM2 CG1 MB How to Order MB1 NC D A1 B 150 0400 N 0200 R XC10 CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-