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4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2 ML2B C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20

151 170 270 308 261 1675 MHL2-25DZ-X85 9 106 128 178 224 174 1815 MHL2-25D1Z-X85 9 160 182 282 328 270 2500 MHL2-25D2Z-X85 9 178 200 320 366 308 2730 Closed C B A A Open D Open E Mounting side Provide clearance between the mounting side and adapter.

89 67 6.6 0.1 50 0.15 76 M8 X 1.25 9 108 80 9 60 92 M10 X 1.5 REC Arm for width across flats RHC Rod end width across flats With arm MTS CC Model MKl32-llN MKl40-llN MKl50-llN MKl63-llN Model MKl32-llM MKl40-llM MKl50-llM MKl63-llM H A A D G B B E C C F D F G M8 X 1.25 18 6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18 20 9 45 43 25 M10 X 1.5 77 22 8 46 8.2 88 18

65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refer to the page 68 for dimensions with connector cable. 20 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP

11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 6.5 6.5 9 9 25 29 36 40 For the following bore/stroke sizes, through-hole is threaded over the entire length.

Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

9 9 9 9 10.5 3 3.5 3.5 3.5 3.5 4 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) Prefix the part number of the air catch

90.0 56 56 56 76 76 76 101 101 71 71 71 104 104 104 129 129 53 53 53 74 74 74 94 94 9 9 9 9 9 9 9 9 3.6 3.6 3.6 7.3 7.3 7.1 14.5 14.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke 32 40 9 13 6 8.5 31.5 35 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9.5 13.5 7 9.5 38.5 42 6.5 9 6.5 9 38.5 42 38 41.5 6.5 10.5 10 14 Bore size (mm) Long stroke 32 40 9.5 13 17.5 23.5 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 10.5 14 18.5 24.5 38.5 42 10 13.5 10 13.5 18 24 18 24 38.5 42 38 41.5 Bore size (mm) 3.8-13 World

7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6 17 37 5.5 5.5 36.9 25.5 5.8 to 8.8 32 39 27 257 31 48 M10 x 1.25 193 25

BUSY (9) SETUP input is OFF. Origin at the retracted end (10) The RESET signal for the Multi-counter (Example) is turned off. Table Note) (9) and (10) are necessary process steps when a multi-counter is used. After "OUT0(INP)" ON, turn off the "SETUP" after more than 0.2 s.