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Check if the load is short circuited. (3) Check if a relay without a surge (3) Use a relay with a surge voltage suppressor or take measures to prevent noise.

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 Step Motor (Servo/24 VDC) 15 (5.5) (6.3) Actuator

B Auto switch a b d c Proper mounting positions (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper mounting positions (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-F9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1mm of the proper mounting positions indicated in the table above.

Check that a pressure above 3.5%F.S. was not applied, during zero-clear operation. Product failure Replace the product. -49NO.ZL3-OM00701-A Error No. Problem Possible cause Investigation method Countermeasure Incorrect power supply Check if the power supply voltage is in the range 24 VDC 10%. Supply power supply voltage of 24 VDC 10%.

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

V Assy ZB1-VPN3--A KJ-C1 ZB1-FE3-A 30m 10 1 ZB1-SE1-A 10 1 Assy ZB1-PS-A Assy ZB1-ZS-A Assy ZZB26 - No.ZB-OM00301 () ZB1-VQ110U() ZB1-VQ110LZB03 ZB04 ZB05 ZB06 ZB00 () ZB1-VQ120U() ZB1-VQ110 K1 N.C. N.C. () () () () () () () () () () J1 N.C.

5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6

Confirm that the connector portion does not move. 14.9 Gray: Ground Black: DC24V 10% ( power supply for input and control ) Blue: 0V ( for input and control ) White: DC24V+10%/-5% ( for solenoid valves/output ) 18 48 34 Straight connector Type Angle connector Type EX500-AP -S EX500-AP -A 6 30 5 50 31.3 28.3 6 Socket Connector Pin Layout 4 3 1 5 30 5 50 2 B. Single power supply system A.

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

Side Front Nil A 10 10 stations D side U side 1 2 3 4 5 02 1/4 (8A) OUT port size Thread type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc G NPT NPTF Nil F N T How to Order Valves (VCA20) VC A 2 3 1 G 3 For air Orifice size Orifice size (mm) 3 5 Symbol 3 5 2

54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Min. Dripping Flow Rate(l/min): 190, Oil Storage Capacity(cm3): 135, Case: [Metal] Metal case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 50, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 190, Oil Storage Capacity(cm3): 135, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 50, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 190, Oil Storage Capacity(cm3): 135, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 50

Min. Dripping Flow Rate(l/min): 190, Oil Storage Capacity(cm3): 135, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 50

Min. Dripping Flow Rate(l/min): 190, Oil Storage Capacity(cm3): 135, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 50, Accessory: Without optional

Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 10 (1), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard