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SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

1 4 8 3 1 2 3 4 AS Specifications Air 1.5 MPa 0.7 MPa 1 MPa 0.1 MPa 0.05 MPa 5 to 60C (No freezing) Fluid Proof pressure ASP AQ150 AQ2000 to 5000 AQ150 AQ2000 to 5000 ASN Max. operating pressure AQ Min. operating pressure ASV Ambient and fluid temperature AK ASS How to Order JIS Symbol ASR AQ 0 0 02 2 0 ASF Standard size Option 1 8 1 2 3 5 H L High temperature (5 to 80C) Low temperature (

-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT

AR40P-270AS AR30P-270AS AR40P-270AS Set nut AR40P-260S AR30P-260S AR40P-260S G46-10-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS

24 24 24 24VDC VDC VDC VDC Class Class Class Class2 2 2 2 UL UL UL UL Listing Listing Listing Listing ( ( ( ( ) ) ) ) D D D D ( ( ( ( ) ) ) ) ! 0~55 -8- NOx 0.1ppm a.0~55 b.35~65%RH c. d. e. f. g. h. i.() j. k. l. m. n. (IDF )(AF/AFF )(AFM/AM , -9- 4 4 4 4-2. 2. 2. 2. 4-2-1. D D 4-2-2.

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

AMR3000 to 6000 Series How to Order Adapter Assembly (Part number for one piece) 03 AMR 4 0 00 02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R ZS-33-F S Stations ZS-33-D S 1 2 3 4 5 ZS-33-D 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Valve station 02 2 stations Valve option 20 20 stations (Max.)

Note 2) Connector orientation can be changed by 180 degrees depending on how to assemble the housing (2) and the terminal block (3). VZ Applicable cable O.D. Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm Type D: 6 to 8 mm Applicable crimp terminal Type E/T: 1.25-3, 1.25-3S 1.25Y-3N, 1.25Y-3S Round or Y shaped crimped terminals can be not used for type D.

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

If the mounting area for the product is not provided with class D grounding, use a grounding tap for wiring. 9 - 4-2-2 Mounting When mounting the product, use a M3 hexagon socket head bolts.

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

2 - (2) Double action type VHS4510~5510 VHS3510 VHS2510 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M Z VHS2510 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 3.2 VHS3510 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 3.2 VHS4510 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 4.2 VHS4510-06 3/4 1/2 110.4 42 75 63 22 58 44

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1