Body Size: 20, Thread: Rc, Port Size: 1/4, Option: Standard, Attachment: 3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V, Semi-Standard 1: Bowl Guard, Semi-Standard 2: Standard

Body Size: -, Thread: -, Port Size: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port Size: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: SV (S + V), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: Standard, Attachment: V (3-Port Valve for Residual Pressure Release), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Applicable Auto Switch Model

CD-P11 CD-P12 2 Contact Protection Box/Dimensions Contact SMC when using built-in contact protection circuit style (D-A34[A] [C], D-A44[A] [C], D-A54/A64, D-B54/B64, D-A59W, D-B59W) in the following conditions: q The wiring length to load is more than 30m. w When using PLC with large flow current Contact Protection Box/Specifications Load voltage CD-P11 CD-P12 Part No. 100V AC max. 200V AC

Digital Flow Switch Series PFA For Air Series PFW For Water

The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10). Output (OUT1) Indicator DOWN Button ( Button) Lights up when OUT1 is ON. UP Button ( Button) Use when decreasing a setting value. Use when increasing a setting value. MODE Button ( Button) SET Button ( Button) Use when changing a function. Use when selecting a function.

Digital Flow Switches Series PF2A

M/C Makes it possible to monitor the air flow from the main line to each branch line. A COM COM COM B DC12V GND F.G. R.S. HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

PSxx-OMU0008CN

ON () (n1Ln1H)ON (35 ) hysteresis 35 (0FF)(ON)(OFF)(ON) 5R.D.(5) () (01 MPa 0.001 MPa 1/1000) () () F // () -15No.PS-OMU0008CN-D (20 ) () 0.50.05Nm ,, <> A(ZS-46-A1) 38L A <> C(ZS-46-E) C 310L -16No.PS-OMU0008CN-D <> (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -17No.PS-OMU0008CN-D <> AB (ZS-35-B) +(ZS-35-E) B A -18No.PS-OMU0008CN-D 812 Nm -19No.PS-OMU0008CN-D () TU0425( 4 2.5) -20No.PS-OMU0008CN-D

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

0.5

surface)) Low-noise fan: 48 dB(A) (Measured at a distance of 300 mm from the workpiece), Rapid static neutralizing fan: 57 dB(A) Offset voltage (Ion balance): 13 V With alarms for Incorrect high voltage, Maintenance warning With flow rate adjustment function (IZF10R) Based on ANSI/ESD-STM3.1-2006 standards 6 C O N T E N T S IZF21/31 IZF10/IZF10R Technical Data IZF21/31 Series IZF10/IZF10R

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AFF

B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AFF75B 1 2 13 42 348 220 57.5 220 10 AFF75A to AFF220A/Dimensions 3-20 holes For anchor bolt mounting Label Drain Rc ORIENTATION G 184 184 236 12B AFF220A 4BJIS10k flange 500 1291 1070 670 325 282 Model A 8B B 380 380 450 C 1125 1125 1178 D 935 935 980 E 505 505 540 F 265 265 265 Port size AFF75A AFF125A

VVXA21/22

VN LVC LVA LVH Variations LVD LVQ Valve Material Base, Body Seal Aluminum NBR, FKM, EPDM LQ Common SUP Individual SUP Common SUP Individual SUP Port A Port A Normally closed (N. C.) LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.)

Pilot Operated Regulator AR425 to 935 Series

Note 2) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing.

90

Flow Rate Characteristics Relief Characteristics IR2020-02-A Supply pressure: 0.7 MPa IR2020-02-A Back pressure: 0.7 MPa ARJ 0.7 0.7 0.6 0.6 AR425 to 935 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 ARX 0.4 0.4 AMR 0.3 0.3 0.2 0.2 ARM 0.1 0.1 ARP 0 0 500 1000 1500 2000 0 0 150 300 450 600 IR-A IR-A Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] IR IRV Pressure Characteristics VEX Supply

ALF400 to 900, ALT-5/-9

hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which