HEC-OM-S008

22 21 20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

D B Reed auto switch D-A93 Solid state auto switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Table of Contents - Tubing

Tube Reel Tube Stand: TB-2 TB-3VS Vertical Stand Applicable tube size mm Model 4, 6 8 10 12 TBR-1 TBR-2 TBR-3 TBR-4 TB-3VS Vertical Stand Dimension: 37 1/4" W x 27 9/16" D x 68 11/16" H Designed for high capacity and reel size flexibility. This stand comes with two cross bars.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

D-F8 has no protrusion from the body's end surface.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction

VKF300

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d D3 L3 L4 AS231F-U01-23 AS231F-U01-04 AS231F-U01-06 AS231F-U01-08 AS231F-U02-04 AS231F-U02-06 AS231F-U02-08 AS231F-U02-10 AS331F-U02-06 AS331F-U02-08 AS331F-U02-10 AS331F-U02-12 AS331F-U03-06 AS331F-U03-08 AS331F-U03-10 AS331F-U03-12 AS431F-U04-10 AS431F-U04-12 3.2 4 6 8 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 8.9 11.0 15.2 18.5 11.0

LEKF-OMZ0035

Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

4-Rc 1/8 1(P), 3(R) port Manual override (Non-locking) Applicable cable O.D. 4 to 6.5 71.5 MAX.10 83 75.5 Indicator light (Type DZ only) V100 67.5 59 2-4.5 (Mounting hole) SY P R P R mPm 4-Rc 1/8 1(P), 3(R) port 8 23 39 2.3 Pg.7 SYJ 1 20.5 P = 19 13.5 5 VK 1.5 20.5 25 30 53.5 300 (lead wire length) L2 L1 31 10.5 23 8 39 VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

VHK

D.

VQ

AXT802-1A-l VG Cable Length Model VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimensions 1.5m 3m 5m VP Mounting direction D U D side mounting U side mounting VQ Note) The number of manifold stations cannot be changed.

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

Compressed Air Preparation Filter

D-G

NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.