R () () P.1-5 P.1-5 7122 20 335 752 670 IDFA100F150F 6 3 6.3 IDX-OM-U022 6.
M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46
fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82
1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !
Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.398 AF Modular Type Air Filter P.402 AFM Modular Type Mist Separator P.402 AFD Modular Type Micro Mist Separator P.404 AR Modular Type Regulators P.412 AL Modular Type Lubricators P.420 AW Modular Type Filter Regulators P.431 ARG Modular Type Regulator with Built-in Pressure Gauge P.437 AWG Modular
Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.398 AF Modular Type Air Filter P.402 AFM Modular Type Mist Separator P.402 AFD Modular Type Micro Mist Separator P.404 AR Modular Type Regulators P.412 AL Modular Type Lubricators P.420 AW Modular Type Filter Regulators P.431 ARG Modular Type Regulator with Built-in Pressure Gauge P.437 AWG Modular
Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity
Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP
Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x
R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M
9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.
R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18
x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 12 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through
R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.
-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type
PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5 9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5 90 M5 19 19 27 M6 x
(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11
13-MGP P.435 Ball bushing MGJ Water-resistant/MGP R/V P.435 JMGP MGP Heavy duty guide rod type/MGPS MGPW MGPW P.478 Slide bearing MGQ MGG Miniature Guide Rod Cylinder/MGJ P.401 MGC MGF Compact Guide Cylinder with Lock/MLGP Slide bearing MGZ P.1075 LOCK Ball bushing MGT Hygienic Design Cylinder/HYG Best Pneumatics No.2-1 Slide bearing MGPW Series (Wide type), Stroke Variations Stroke (mm)
M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.