HRX-OM-W032

Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-10 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No. 6 Flow switch Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No.

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

reduces flow setting time

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

VZS

3 in the side added with manifold block. 2 stations (10 stations) 3 stations 2. Joint the tie-rod y to increase stations and add manifold block assembly. (Put packing B w on the surface contacting to the end plate.) (11 stations) 4 stations (12 stations) 5 stations 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !

VZ5000

Fig. (2) Note) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/exhaust block assembly must also be added. Hook this part onto the DIN rail, and press down in the direction of the arrow.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82 54 4 55 75 23 27 7 5 66 36 10 15 30 The dimensions other than indicated below are the same as those of indicated on p.3.4-8.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z DA DDH10 (Hole) DU DC DX DE DO DR DT DS DH DF B W1 DL MGQ CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 10 165 57 11 65 15 85 10 9 17 8 40 52 60 35 +0.058 0 10 10 183 57 35 11 65 18 85 10 9 17 8 40 52 70 +0.070 0 12 MGG 10 196 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 +0.070 0 16 12 235 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 +0.084 0 20 MGC 12 256 93 16.5 100 35.5 130

VHK

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

VHK

Flame resistant style 1(P)/2(A): One-touch fitting Effective area Tube O.D (mm) Model (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 1(P)2(A) 2(A)3(R) 18 2(A) 4 1(P) 4 3.4 1.2 47.6 23.8 23.8 16.5 51.6 15.8 15.8 41 3.5 11 VHKlR-04F-04F VHKlR-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHKlR-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHKlR-10F-10F 22 10

VHK

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

HRX-OM-W038

See note 3 for other conditions. 10 Dimension between panels. Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

Stopper Cylinder

13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

IDX-OM-W026

L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026

Compact Cylinder

MU-C02 MU-C03 MU-C04 Pin material: Carbon steel +0.058 0 +0.058 0 +0.058 0 8 10 10 Knuckle pin is included in the double clevis and double knuckle joint as standard. C-type retaining ring for shaft is included. Rod End Nut CZ 8 10 10 CX 9 11 13 CT 9.5 11 14 CR 5.3 6.4 8.4 CL 26 42 54 Part no.

HRX-OM-O021

See note 3 for other conditions. 10 Dimension between panels. Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.

HRX-OM-R005

See note 3 for other conditions. 10 Dimension between panels. Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

Compact Hydraulic Cylinder

11 100 20 25 98 28 57.5 89 26 17.5 depth 13.5 77 11 Rc3/8 112.5 100 M20 x 2.5 156 6.5 26 12 107 24 30 117 29 67.5 95 26 17.5 depth 13.5 94 11 Rc3/8 132.5 Rod end male threads (mm) H C D L K X Bore size (mm) 20 M8 x 1.25 15.5 10 23 8 18 32 M14 x 1.5 27 16 38.5 14 30 40 M14 x 1.5 27 16 38.5 14 30 M18 x 1.5 50 32 20 46 18 35 M18 x 1.5 63 32 20 46 18 35 M22 x 1.5 37 25 51 22 80 40 M26 x 1.5