Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63

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Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 700 for details.) 699 AS-FG Series How to Order AS 200 1 F G 06 Lock nut option Nil J Hexagon lock nut Round lock nut Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to the below for details.) Applicable tubing O.D.

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

Table of Contents - Tubing

200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66 3 to 44 3 to 90 3 to 40 3 to 45 3 to 35 3 to 35 3 to 30 4 2.5 6 4 8 5 10 6.5 12 8 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) L* is calculated by the number of coils (N) x O.D. 10Clean Series (Example) 10-TCU0425B-1 TUB-11 Polyurethane

Digital Flow Switches Series PF2A

500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 Series PF2A Dimensions: Remote Type Display Unit for Air (4-channel Flow Monitor) PF2A200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter

Electromagnetic Digital Flow Switch

Specifications (Integrated Display Type) Model LFE1 LFE2 LFE3 Applicable fluid*1 Water, Conductive fluids which do not corrode the fluid contact materials.*1 Applicable fluid conductivity*1 5 S/cm or more (micro siemens) Detection method Electrostatic capacity Ground*10 Negative ground Rated flow range*11 0.5 to 20 L/min 2.5 to 100 L/min 5 to 200 L/min Display flow range 0.4 to 24.0 L/min

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

1 4 11 13 3 8 " " 1 2 Principal Parts Material Element Part No.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

ML2B

ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 ML2B25 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) RS H A RZQ ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) MI W S 40 20 30 20 5

XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-11 pc. (Blanking plate) VV3Z4-50-061-01 (6 stations) VZ415-1G3 pcs. VZ425-1G2 pcs. VVZ400-32A-21 pc.

LEF-OM006xx

22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 2 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200

Compact Slide Series MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Up to 100 Up to 300 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) 50 (4) 200 (6) 50 (7) 200 (9) 50 (10) 200 (12) (2) 100 (5) 100 (8) 100 (11) Load eccentricity (l mm) (1) (3) Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

Speed Controller with

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 12, 13 Flow rate [L/min (ANR)] 1000 Flow rate [L/min (ANR)] 1000 08, 09 10, 11 500 500 06, 07 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations The numbers above the flow rate characteristic curves in the charts show the applicable tubing outside diameter as defined by the product number.

CE

49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

Refrigerated Thermo-chiller

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 30 19 Refer to page 94.