XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

PFxx-OMY0005

(Page 77) 8000 0x1F40 0 R 8010 0x1F4A 0 R Flow rate PD conversion equation: b F32 N 8020 0x1F54 0 R Flow peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N 8060 0x1F7C 0 R Accumulated PD conversion equation: a F32 N Measurement related 8070 0x1F86 0 R Accumulated PD conversion equation: b F32 N Refer to "Inclination and intercept to the unit specification".

Air Catch Sensor Series ISA

Assembly 806 Air Catch Sensor Series ISA2 Parts List End plate R ISA-6-B Terminal block box Switch mounting bracket ISA-3-A Left Right ISA-7-B Seal for additional station ISA-6-A End plate L ZSE ISE Throttle 2 port solenoid valve ZSP Spacer PS Regulator Y20 ISA Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized wiring/Supply port right) PSE IS IN ISG ZSM

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

SFOD-OMT0009CN

b) 2 1 (8) (14) (a) B1 A1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 [820m] (a) (b) L E C P * A B-1 2 L 1 A A-1 6 B B-2 ) 8 8m 5 B A-2 ) 3 A 10m COM-A/COM B-3 4 COM-B/ A-3 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 ) A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 (18) A6 B6 (6.3) 15 16 L (11) (30.7) 82 No.SFOD-OMT0009CN-B

SFOD-OMT0010

7 A B-5 Nil Robotic type cable Black 6 A A-5 Orange 9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) (14) B A1 (17.7) 6 5 1 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2

LEC-OM069xx

DISCONNECT 11 Turn off the control and main circuit power supplies.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Note 11) Refer to Straight Piping Length and Accuracy on page 4 for details.

JXCx-OMY0004

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 B 15m (3

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350

Compact Cylinder

+ Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5 3.5

OMR0032

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

CC

When selecting a converter by its nominal diameter, the converters oil level speed should be 0.2 m/s or less. 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 Step (3) Select required function for valve unit 100 100 80 CRA1H63-90 Select a model from data (B), by determining

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

PFxx-OMU0002

[October 2017] B: Contents revised in several places. [July 2018] C: Contents revised in several places. [August 2019] D: Contents revised in several places.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

The screw[B] that is the fixation of "Motor" is loosened (To extent in which the slide can be done), and "Belt" is removed. Screw[B] Belt -25- 5. After "Belt" is installed, the root of "Motor" is pulled in a string or a long banding band. With tensile force adjusted, tighten the screw[B] which fix the actuator to the motor. See the table below pull 6. Screw[A] is tighten to fix Motor.

JXCx-OMY0008

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 (3) B 15m