Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Axial Foot, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: None, Bore Size: 25mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Bore Size: 20mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 125mm, Cushion: -, Head Cover Port Location: -, Version: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Swivels

PS1690202-16-16 4.32 3.46 2.16 1.62 1-11 1/2 1-11 1/2 109.8 mm 87.9 mm 54.9 mm 41.3 mm NPTF NPTF 3 Piece Design D Swivels A B D Part Number A B C D Wrench Flats Dia.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

2 Phase Stepper Motor/Without Motor Brake Series LXP

(B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

Aluminum High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

port 1 24 2 60 (69) 18.5 34 D-97/93A 15 30 11-5-11 11 Series MSUA These drawings indicate the condition when the B port is pressurized.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30