Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

5 Port Solenoid Valve Series SQ1000/2000

A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21

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0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l\

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

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Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS120M AS220M-01 AS220M-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Construction Meter-out type AS1200M AS2200M u w u w t e r !0 !1 i q !4 r e !0 !1 q i !

RHC

B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 6 1/4, 3/8 8 1/4, 3/8 10 1/4, 3/8 10 1/4 Maximum

CNS

Graph (1) 30 20 10 2.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

IDX-OM-W093

ADH-E400 1.6MPa 0.051.6MPa 3/h 0.024m 0.7MPa IDF60/70/80/90 Series 10-1 IDX-OM-W093 L 10.3 Rc1/225 30 5 IDF60 2722IDF70IDF80IDF90 22 IDF60 (IDF70/80/90) 1) 2830Nm 2) 10.4 1 1 IDF60/70/80/90 Series 10-2 IDX-OM-W093 R 11 R R (GFCI) 11.1 11.2 IDF60-20-R IDF70-20-R IDF80-20-R IDF90-20-R (A) 10 15 20 30 (mA) 30 IDF60-30-R IDF70-30-R IDF80-30 IDF90-30 (A) 10 15 20 (mA) 30

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 04 (1/2), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, Â

Body Size: 40, Back Flow: K (w/Backflow), Thread: F (G), Port Size: 04 (1/2), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa,

Body Size: 40, Thread: F (G), Port: 04 (1/2), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: F (G), Port: 04 (1/2), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Regulator Unit Combination: Air Filter + Regulator, Port Size: G1/2, Filter Rating: 5μm, Operating Environment: Air powered tools, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Filter, Drain Storage Capacity

Regulator Unit Combination: Air Filter + Regulator + Lubricator, Port Size: G1/2, Filter Rating: 5μm, Operating Environment: Air powered tools, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock