Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is made

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 21P (5 Port/Body ported) How to Order SS5YJ721P 05 A, B port Applicable blanking plate assembly SYJ7000-21-3A A B P, R port thread type A B Stations A B A B P port 1/4 03 3 stations Nil F N T Rc G NPT NPTF : : Applicable connector assembly Refer to page 59. 12 12 stations R port 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

CG5-S

Chemical (Concentration weight %, Temperature C) Symbol FKM (40 to 150C) PVC (10 to 60C) NBR (10 to 60C) PBT (10 to 60C) AI SUS304 Hydrochloric acid (20%, Room temperature) D D B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide

REC

-7 lNA FT RSH K A FX FZ Mounting hole F N N Z CE1 S+Stroke H 40 ZZ+Stroke CE2 Standard port ML2B Relieving port ML1C (mm) 2-7 FT FX FY FZ B1 D A AL B B2 F G H E Bore size Stroke range Mounting hole REA 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45

MU

113 125 142 169 179 RR 8 10 10 14 16 L 17 22 27 32 38 CZ 18 22 26 32 32 CX 9 11 13 16 16 CDH10 8 10 10 14 14 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 Spring return Z + Stroke Spring extend Z + 2 x Stroke +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis style.

MU

Spring return ZZ + Stroke Spring extend Z + 2 x Stroke 7-8-17 18 Plate Cylinder Series MU Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC

Thermo-chiller/Rack Mount Type

port (Option Z) 0 0.00 0 2 4 6 8 10 12 14 0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

ZZ Z LH LS B C2 RR B LC LD LT LX LZ X Y Z ZZ FD FT FX FY FZ L U Z ZZ TD TT TX TY TZ CD CX CZ Front Rear Front Rear Front Rear Front Rear MY1 20 25 32 40 400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40

MLGP

9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

H7 WA Z WB b a H7 6 c d 7 e T-slot dimensions CL 5 10 6 H7 X X 0.02 CL1 c d e Detailed figure of XX section b 20.3 23.3 Bore size (mm) a 13.3 15.3 80 100 12 13.5 8 10 22.5 30 MLGC 4-YY depth YL Bottom view Section XX CNG MNB Extension locking Retraction locking CNA LOCK LOCK CNS 4-OA through Section XX Z WA IA IC IC 4-NN through IH L 4-MM depth ML 4-OB counterbore depth 8 Section XX CLS

CNG

2.5 73 154 10 12 10 6.6 35 54.5 40 4.5 49.4 48 22 28 67.7 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 10 (12) 14 10 6.6 40 65.5 49 4.5 58.4 56 30 30 78.7 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l ZZ H Z e f h ZZ 35 165 186 30 16 55 185 206 0.25 x Stroke 40 180 201 30 17 62 202 223 40 184 208 35 17 62 206 230 229 (236) 50 209 (216) 237 (244) 35 17

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

NCA1

, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order T BORE STROKE XB5 Z NC D A1 X46US Z-Dimension use a four digit number Ex: NCDA1T 250-0400-XB5-X46US-0700 Auto-switch capable Oversized Rod Z Dimension Special Trunnion Location NC A1T (200 ~ 400) * XB5 X46US * (in) Z RANGE MIN MAX Bore (in) MM KK A AA B BA C D DD E EA EE G J R TL TM TT UM UV

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

7ND9071en

mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

Digital Flow Switches

or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M (500VDC) between external terminal and case 10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s,