Electric Actuator

L K UT YB-03 Material: Stainless steel UA C 7 25 9 34 11.5 depth 7.5 [mm] Weight oz. (g) Weight oz. (g) Applicable size 25, 32 6.5 Applicable size UA C d1 d2 H K L UT T1 T2 V W RS Part no. Part no. LEY-U025 25, 32 17 YB-03 11 16 8 M8 x 1.25 14 7 6 0.78 (22) 10 18 50 9 2.82 (80) Floating Joints (Refer to Best Pneumatics No. 2 for details.)

MB

N Tie rod, cushion valve, tie rod nut, etc. 550 860 1340 2140 3450 5390 -XC7 made of stainless steel C76 Back lash 1.5 mm or less -XC10 Dual stroke cylinder/Double rod Manual release Non-locking type, locking type -XC14 Change of trunnion bracket mounting position C85 Double clevis pin and double knuckle -XC27 pin made of stainless steel C95 Accessory -XC29 Double knuckle joint with spring

MG

N 215 330 550 860 1340 2140 3450 5390 Made to Order Specifications (For details, refer to page 8-31-1.) Backlash 2 mm or less Manual release Non-lock type, Lock type Symbol Specifications Adjust switch positions for operation at both the stroke end and backlash (2 mm) movement positions. -XC79 Machining tapped hole, drilled hole and pin hole additionally.

4-channel Flow Monitor ( compatible)

4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to 3.5 to 7 to 112 20 to 0.25 to 1.3 to 2.5 to 4.50 18.0 45.0 280 4.50 21.0 45.0 L/min L/min L/min L/min L/min L/min L/min L/min (Displays (Displays (Displays (Displays (Displays (Displays (Displays (Displays Instantaneous flow display/ Set flow range 0 to 11 0 to 55 0 to 110 0 to 220 0 to 550

10

N 32 40 50 63 80 100 -XAl Change of rod end shape CA2 550 860 1340 2140 3450 5390 -XC7 Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel Back lash 1.5 mm or less CS1 Manual release Non-locking type, Locking type -XC10 Dual stroke cylinder/Double rod type -XC14 Change of trunnion bracket mounting position CS2 -XC27 Double clevis and double knuckle joint pins made of stainless

Refrigerated Thermo-chiller

Applicable sensors: PSE53, 54, 56 Capable of controlling various different applications from one controller 4 inputs, 5 outputs Separate type monitor PSE200 2-Color Display Digital Pressure Sensor Controller PSE300 Series Features Applicable sensors: PSE53, 54, 550, 56 Compatible with voltage input and current input Response time: 1 ms Space-saving, capable of vertical and horizontal

0.55

port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold base W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550

5

Bore size (mm) B D E J M O d1 d2 YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 L UT YB-08 80 16 11 38 13 52 18 depth 12 C UA YB-10 100 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plating) Part no. Bore size (mm) T1 T2 V W RS Weight (g) Part no.

Compact Rotary Actuator Series CRQ2

Double shaft ( ) Cushion Not attached, Air cushion Rubber bumper J CRBU2 80 to 100, 170 to 190, 350 to 370 Rotating angle K Double round shaft Port size Rc 1/8, G 1/8, NPT 1/8, NPTF 1/8 M5 x 0.8 CRB1 Auto switch Mountable MSU Dimensions CRJ T J K Shaft type Size 20, 30, 40 CRA1 CRQ2 MSQ MSZ Form CRQ2X MSQX Size 10, 15 MRQ D (g6) G W H M N UT UJ UK Size 10 15 20 30 40 5 4.5 18 9 6 35 44 53

Table of Contents

(kg) (800) 50 W l (600) 40 Caution 30 W l Weight (m) MY1H40 MY1H40 (550) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Air Slide Table

Weight [g] Model Standard stroke [mm] Reduction of the shorter Additional weight of adjuster option Extra for option 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Buffer End lock Axial piping MXQ6A 130 130 170 190 210 6 10 8 30 40 total length type MXQ8A 140 160 180 210 270 290 6 10 8 30 60 MXQ12A 270 290 310 370 400 540 610 12 20 16 70 80 MXQ16A 480 510 550 630

MY1

l (600) 40 Weight m 30 W Caution MY1H40 MY1H40 MY1H40 (550) l W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

HRX-OM-M005

Battery Lifetime: Approximately 5 years Type: Manganese dioxide primary lithium battery Nominal Voltage: 3V Nominal Capacity: 550 mAh Nominal Discharge Current: 0.2 mA Weight: 6.8 g Dimension: Diameter 24.5 mmHeight 5.0mm The lifetime of the battery is approximately 5 years. When the battery is fully depleted, the internal clock and customer settings will be lost.

DOC1001322

Battery type: GT11-50BAT System: Manganese Dioxide-Li/Organic Electrolyte Nominal Voltage: 3V Nominal Capacity: 550 mAh Nominal Discharge Current: 0.2 mA Weight: 6.8 g Dimension: 24.5 mm5.0mm The lifetime of it is approximately about 5 years, and the touch panel makes MT07/ Low Battery Maintenance notice when the battery needs to be replaced. 1.8 Safety Data SheetSDS If the safety data sheets

Step Motor Driver （ Pulse input type ）

ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 87 - Appendix 1.2 LEF series setting value LEFS Step data default Model LEFS16 LEFS25 LEFS32 LEFS40 Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 No. 0 0 0 0 Movement MOD ABS ABS ABS ABS to 500 500 250 1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600 900 500 250 1200 500 250 500 500 250 601-700 630 420 230 930 500 250 500 500 250 701-800 550

JXCx-OMT0002

125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18 9 5 24 12 6 24 12 6 Min. speed [mm/s] (Speed tuning control ) 22 12 6 26 13 7 34 17 9 34 17 9 Supplement 1.2 Initial setting of LEFS series Model LEFS16 LEFS25 Lead symbol A B H A B Lead [mm] 10 5 20 12 6 Stroke (mm) 500 500 500 600 700 800 600 700 800 600 700 800 Max. speed [mm/s] 500 250 1000 900 630 550

SFOD-OMT0010

125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and 15 8 4 18 9 5 24 12 6 24 12 6 interpolation) Min. speed [mm/s] 22 12 6 26 13 7 34 17 9 34 17 9 (Speed tuning control) Supplement 1.2 Initial setting of LEFS series Model LEFS16 LEFS25 Lead symbol A B H A B Lead [mm] 10 5 20 12 6 Stroke [mm] 500 500 500 600 700 800 600 700 800 600 700 800 Max. speed [mm/s] 500 250 1000 900 630 550

Compact Cylinder Series CQS

Please consult with SMC. 10 9 8 25 7 6 5 20 4 16 3 2 12 1 0 50 100 200 150 250 300 Stroke ST (mm) 550 Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS 12, 16, 20, 25 How to Order B 20 D 30 CQS M9BW B D 20 30 CDQS With auto switch Made to Order Refer to page 552 for details.

24

N 20 25 32 40 50 63 80 100 215 330 550 860 1340 2140 3450 5390 Backlash 2 mm or less Manual release Non-lock type, Lock type Adjust switch positions for operation at both the stroke end and backlash (2 mm) movement positions.

Smooth Cylinder/Low Speed Cylinder

MQ K (Width across flats ) YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 H RHC (With locking) YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 RZQ d1 d2 YB-08 80 16 11 38 13 52 18 depth 12 YB-10 100 19 14 50 17 62 21 depth 14 L UT Weight (g) Bore size (mm) C UA T2 V W T1 RS Part no. Material: Chromium molybdenum steel (Nickel plated) YB-03 32, 40 6.5 10 18 80 50 9 Part no.