Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with air cushion, Slide bearing or

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Size: 22 (Base Mounted), Operation: 2 (Internal Pilot Solenoid Valve), Port Size: w/o Sub-plate, Thread: Rc(PT), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z [Light & Surge Voltage Suppressor (Except Grommet)]

Magnet: D (Built-in), Mounting: B (Basic), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 2200 (22"), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Size: 11 [59scfm, 100m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: AK (A+K)

Size: 11 [59scfm, 100m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: AR (A+R)

Size: 55 [226scfm, 384m³/hr (ANR)], Voltage: 46 (Three-phase, 460VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: LR (L+R)

Size: 6 [25scfm, 43m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: AT (A+T)

Size: 8 [41scfm, 70m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: AK (A+K)

Size: 8 [41scfm, 70m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: KR (K+R)

Size: 6 [25scfm, 43m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: TV (T+V)

Size: 8 [41scfm, 70m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: TV (T+V)

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: 46 (Three-phase, 460VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: LT (L+T)

Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: TV (T+V)

Size: 11 [59scfm, 100m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: RT (R+T)

Size: 55 [226scfm, 384m³/hr (ANR)], Voltage: 46 (Three-phase, 460VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: LT (L+T)

Size: 55 [226scfm, 384m³/hr (ANR)], Voltage: 46 (Three-phase, 460VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: RT (R+T)