Main Body Shape: Unit, Additional Function: Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destructive Valve / Central Exhaust Specification, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Operating Temperature Range(°C): 5:50～, Suction

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): 0 to -101.3, Vacuum Port Connecting Port Shape: M5, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: M5, Air Supply Port One-Touch Fitting Size: -, Application: Individual Item, Operating Pressure Range(MPa): 0.3～0.5, Operating Temperature Range(°C): 5:50～, Body Material: Stainless

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): 0 to -101.3, Vacuum Port Connecting Port Shape: M5, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: M5, Air Supply Port One-Touch Fitting Size: -, Application: Individual Item, Operating Pressure Range(MPa): 0.3～0.5, Operating Temperature Range(°C): 5:50～, Body Material: Stainless

HRX-OM-S004

C, use a 15% aqueous solution of ethylene glycol. Tap water may be frozen in the thermo-chiller which may damage the product. 3.5 Circulating Fluid Supply HRS Series 3-32 HRX-OM-S004 Chapter 3 Transport and Setting Up 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

High Vacuum L Type Valve

E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa

XLA Series

Construction and Outer dimensions Auto switch (option) Indicator (option) Bonnet assembly (maintenance part) 1 Magnet (option) Pilot Port (opened by applying pressure) Bellows holder (material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange )

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. 1 ( 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Actuator mounting A Model Bolt size Maximum tightening torque [Nm] Amm) mm LEKFS16 M3 0.63 3.5 23.5 LEKFS25 M4 1.5 4.5 24 LEKFS32 M5 3.0 5.5 30 LEKFS40 M6 5.2 6.6 31 4. When mounting the actuator, leave a gap of 40mm or more to allow for bending of the actuator cable. 20 - 3.4 Precaution on maintenance Warning 1.

VFR2000 Series

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows. Caution Caution Mounting 1.

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Auto switches are shipped together (not assembled). 412 Guide Table Series MGF Specifications Bore size (mm) 40 50 60 Action Double acting Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.1 MPa Ambient and fluid temperature 10 to 60 C Piston speed 20 to 200 mm/s Cushion Rubber bumper on both ends Lubrication Non-lube Stroke length tolerance

Series DXT474

Tightening torque Thread Appropriate tightening torque Nm (kgfcm) M3 M5 0.3 to 0.5 (3 to 5) 1.5 to 2 (15 to 20) Wiring 1Polarity When DC power is to be connected to a solenoid valve equipped with light and/or surge voltage suppressor, check for polarity indications.

VY511, VYU5

(Refer to graph A) No AW AMR AWM Graph C: The balance completion time Yes AWD 5 ITV No Is the cylinder speed appropriate? (Refer to graph B) 4 VBA Completion time (sec) 3 VE Yes VY 2 Use graph C as a guide for the balance completion time.

VS7-6

AXT502-18A (for air release valve adaptor plate) Blank plate MP2 (for control unit/filter regulation valve) MP3 (for pressure switch) AXT502-26A P port regulation A port regulation B port regulation Classification of Control Unit ARB250-00Air release valve adaptor plate AXT502-17A Symbol AXT503-37A AN110-01 VV71-R-AB Main EXH back pressure block plate Silencer for pilot EXH AP M MP F G C

Multistage Ejector Series ZL112.212

unit: kPa Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 Output specifications Rated voltage (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) Electrical entry DC specifications 5 6 V S R 24V 12V 6V 5V 3V G H L LN LO M MN MO Lead wire length 0.3 m Grommet Lead wire length 0.6 m N P A B C

IDX-OM-W089

IDFA6E-20 7 1 7-1Safety instructions IDX-OM-W089 Air Dryer 8 Specification for Option C 8 Specification for Option C When performing the installation and maintenance of the product, the following points must be understood and followed. 8-1 Safety instructions When handling the product, take care of the following precautions.

SY3000/5000/7000 Series Plug-in Type

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be 3% or less of the rated voltage. 6.