Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Digital Flow Switch

[F 1] Setting of OUT1 completed.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Compact Vacuum Unit Ejector/ Vacuum Pump System

2001 (JIS B8392-1:2003).

CLK1

Operating Environment Lubrication Piping Caution Caution Warning 1. Lubrication of cylinder The cylinder has been lubricated for life at the factory and can be used without any further lubrication. 1. Do not use in environments where there is a danger of corrosion. 1.

Low Friction Cylinders Series MQ

6 r t !3 w q e !5 !0 !1 !

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s R, Rc, NPT, G)> VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 32 40 50 63 80 100 CQ2Y32-PS IN 181 302 422 Piston seal 1 pc. CQ2Y40-PS 32 OUT 241 402 563 Rod seal 1 pc. CQ2Y50-PS IN 317 528 739 Gasket 1 pc. CQ2Y63-PS 40 OUT 377 628 880 Grease pack (10 g) 1 pc.

CQS

5 5 1 Made to Order Note 1) Consult SMC for shorter stroke length than indicated in the table.

MTS

0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

20

Flow-rate characteristics (With nozzle removed) C (dm3/sbar): 6.0, b: 0.25 (Effective area: 30 mm2) Port size Rc, NPT, G 1/4, 3/8 Piping entry Bottom Top Nozzle port size Rc1/4 Weight (Main unit only) 165 g Operational force (when the valve is fully open) 7 N 1 Blow Gun Series VMG Construction !2 !6 !1 Note Component Parts i u r e q w Description No.

mb1

1 !6 !3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

70astamb1

0 i o @1 @2 @3 @0 !6 !3 r !5 u q ye t !9 !8 !4 w !7 CA2 1 CS1 1 MBK32 only A C76 C85 C95 Rod sectional view A-A' A' CP95 NCM !2 !1 Component Parts NCA No. q w e r t y u i o !0 !1 !2 Description Material Note Description Piston nut Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Material Note No.

Activated Carbon Filter

AMK20 AMK30 AMK40 Port size 1/8, 1/4 1/4, 3/8 1/43/8, 1/2 Fluid Air Ambient and o fluid temperature -5 to 60 oC (No freezing) Proof pressure 1. 5MPa Max. operating pressure 1. 0MPa Min. operating pressure 0.05MPa Outlet side oil concentration Note1) Max. 0.003mg/m3(0.0025ppm) Compressed air purity class Note 2) ISO8573-1: 2010[1: 4: 1] Note 3) Max. flow capacity Note 4) 300 L/min (ANR) 750L

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

VQC5000Series

Warning Connection thread size (R,NPT) Proper tightening torque (N m) 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 3/4 28 to 30 6 No.VQC5000V-OMU0002 Precautions for 5 Port Solenoid Valve 4 4 4 4 VQC5000 Series Be sure to read before handling. Refer to main text for detailed precautions on every series.

Rotary Cylinder Series MRQ Size: 32, 40 1

steel Magnetic material Rolled steel Resin Brass NBR NBR Description Size Replacement Parts 32 P31701-1 40 P31702-1 Electroless nickel plated Spare parts assembly The parts of the above mentioned numbers r, i, !

MIST SEPARATOR

AF-OMR0020-C PRODUCT NAME MIST SEPARATOR MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.