VQ5000

Outstanding response times and long service life kit (Lead wire) F L (Metal seal with light/surge suppressor) kit (D-sub connector) VQ5100 32 mS (Single) Enclosure IP65 compliant Dust tight/Low jetproof type 100 million cycles According to SMC life test conditions VQ5200 17 mS (Double) Accuracy 3 mS Enclosure For applications which demand high speed, high frequency, long life

Size: 32, Motor Mounting Position: In-line (sizes 25, 32, 40, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: B (Size 25: 6; Size 32: 8; Size 40: 10), Stroke: 700mm, Motor Option: B (with Lock), Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Escapements/Single Finger Type Series MIS

Escapements/Single Finger Type Series MIS 8, 12, 20, 25, 32 Replacement Procedure is P.390 Construction Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 8 e !0 !1 !2 25, 32 Option !

Input modules can be added or removed at the point of use.IP67 enclosure (IP40 for SI unit compatible with ControlNet), Maximum 32 inputs/32 outputs , Connection of sensor with M8/M12 connectors possible , Available communication protocols include: DeviceNet, PROFIBUS DP, CC-Link, AS-i, CANopen, ControlNet and EtherNet/IP , Applicable to valves: VQC1000/2000/4000, S0700 and SV1000/2000/3000

The VXA31/32 series manifold is individual ported.

PF2A/PF2W

If operated outside of the flow rate measurement range, the Karman vortex will not be generated and normal measurement will not be possible. 16-11-32 29 Series PF2A/PF2W Specific Product Precautions 2 Be sure to read before handling. Mounting Usage Warning Warning [For air] 9. Never mount a switch in a place that will be used as a scaffold during piping.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

VNH

2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

SYJA3000

A B M5 X 0.8 (pilot port) 10 24 A B 19 R P 2.6 23.5 237.5(mounting holes pitch) Bracket SlA (Mounting holes for manifold) (Mounting holes) 4 47 42 (Non-locking) Manual override VlA 30 24.5 37 23 20 3 11.5 3.5 4 11 2.6 2(Mounting holes) 18 (Piping port) 4-Rc(PT)1/8 19.5 46.5 25 SlA 1.8 (Bleed port) With filter (80 Mesh) 2.3 46.5 33.5 21.5 5-M5 X 0.8 (Piping port) VlA 8.5 6 6 15 17 17 24 32

Vacuum System Peripherals:

32 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VQ

L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

ZR

32 Series ZR Large Size Vacuum Module: Ejector System Circuit diagram ZX ZR ZM Individual spacer (ZR1-R1-4) PV PD EXH PS Function plate (ZR1-R1-4) ZH X X X X X PS PE ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SOL.C Silencer ZL SOL.A SOL.B Vacuum switch X

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

NVKF

Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

Process Pump

Nut, 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Applicable tube size (inch) Size Symbol 2 1/4" x 5/32" A Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting.

PF2D

Order example Tubing size 1/4" x 5/32" Tubing size 1/4" x 5/32" PFM PF2D504S-11-1-1S11 PFMB PFMC IN side OUT side SMC SMC PFMV PF2D504S-11-1-1S11 1 LQ1E3B-SN (Union elbow) PF2A LQ1T3B-SN (Union tee) LQ1E3B-SN (Union elbow) 1 PF3W LQ1T3B-SN (Union tee) 1 LFE Note) Flow sensors and fittings are shipped packed separately.

10

RJ20: Cylinder bore size 32 or higher or thrust 240 N or higher RJ27: Cylinder bore size 40 or higher or thrust 380 N or higher C Ambient temperature t Collision speed m/s Impact mass kg m Equivalent mass kg Me Angular speed rad/s DFriction coefficient Note 4) For the formula for moment of inertia (kgm2), refer to the rotary actuators catalog.