3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

Metric), Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

), Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

), Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

), Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Vacuum, V Port: 08 (ø8 One-touch Fitting, Metric), Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

, V Port: 07 (ø1/4 One-touch Fitting, Inch), Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Vacuum, V Port: 06 (ø6 One-touch Fitting, Metric), Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Vacuum, V Port: 06 (ø6 One-touch Fitting, Metric), Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Thread: C (with Pump System PE Port Female Thread), Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type), Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.)

3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

ZSE1/ISE1

HYS Indicator light SE1(L)-18/-19 I Z Brown DC (+) Lead wire 0.2 to 0.33 mm2 Max. coating O.D. 1.7 mm Black OUT1 Socket LED Red Hook White OUT2 1 k Connector DC polarity indicator SE1(L)--16/-17 I Z Blue DC () With pressure setting trimmer 1 (SET 1), OUT 1 (Black lead wire, Red LED) can be set.

ZSE30/ISE30

Output impedance: 1 k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24 VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20 mA (2.5% F.S.)

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.