Modular Design with Uniform Body Style

*2 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Auto drain minimum operating pressure N.C.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

C95

4, 8, 12, 16 250 10 200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4

Rotary Actuator/Vane Type

2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MSQ Lead wire Vinyl parallel cord, 0.2 mm2, 2 cores, 0.5 m Note 1) Regarding the common specifications of the reed switches, refer to page 11-11-5. Note 2) Regarding the lead wire length, refer to page 11-11-5. Note 3) Under 5 mA, the strength of the indicator light is poor.

2-Color Display Digital Flow Switch Series PFM

A 4 (5/32") 64.2 18 6 64.6 8 (5/16") 68 OUT1 OUT2 1/4" 64.6 10.2 DC () DC (+) 1 43 IN OUT (34.2) 13 1 IN 3 2 x one-touch fitting 18 2 x 3.4 28 8 2 x 2.6 depth 5 PFM7-C4L/C6L/C8L/N7L 88 (mm) 48 One-touch fitting Applicable tube O.D.

ITV

839 Series ITV009 Dimensions 28 For Single Unit 4 x 6 74 64 2 x 6 ERR PWR 38 27 15 ERR PWR 2 x 3.5 Mounting hole 4 x 3.5 Mounting hole L-bracket (Option) Flat bracket (Option) M8 x 1 Cable connection thread 15 6 50 82 73 Breathing hole Note) 3.7 3.7 (M3 x 0.5) 1 VACz OUT port (4, 5/32) VAC port (4, 5/32) 13.7 OUTx 13.7 3 5 ATMc 2 5 ATM port (4, 5/32) 3 6 7 3.5 L-bracket (Option) Flat bracket

JXCx-OMY0004

Alarm was generated in order of (1) -> (5) 16 Alarm 1 17 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 18 Alarm 3 Alarm 2 0 (1) (2) (3) (4) Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. Refer to 15.3. Alarms and countermeasures (P.66) for detailed alarm information. 19 Alarm 4 5 Please refer to 20.

VQ7-6/7-8

Sub plate port size 1 5 (R1) (P 3 ) (R2) Without sub plate Side port Rc3/8 Side port Rc1/2 Side port Rc3/4 Bottom port Rc3/8 Bottom port Rc1/2 Bottom port Rc3/4 Nil A03 A04 A06 B03 B04 B06 (A) 4 (B) 2 FHG 1 (P) 5 (R1) 3 ) (R2) (A) 4 (B) 2 FJG 1 (P) 5 (R1) 3 (R2) Seal type Nil R Metal seal Rubber seal (A) 4 (B) 2 FPG 1 (P) 5 (R1) 3 (R2) Options (A) 4 (B) 2 None Indicator light Indicator

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Stainless Steel 316 Fittings

" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 1/2" 3/8" Note 1) D is maximum diameter.

Modular F.R.L. Unit

G36-2-01 G36-2-01 G46-2-02 G46-2-02 Square embedded type Note 4) GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 5) N.O.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1.5m 1 Green 3 COM-A/COM B-3 3m 3 Blue 4 COM-B/ A-3 Shield 5m 5 Cable color Terminal no.

F

White Body Fitting Release Button: Imperial: Orange Metric: Grey Imperial Size: 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 Metric Size: 23 3.2mm 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm 16 16mm Imperial 32 UNF 10-32 33 1/16 34 1/8 35 1/4 36 3/8 37 1/2 03 5/32 Dia Reducer 05 3/16 Dia Reducer 07 1/4 Dia Reducer 09 5/16 Dia Reducer 11 3/8 Dia Reducer 13 1/2 Dia Reducer 00 Same Diameter

CQS

2 6 7 Long stroke 5[-2.5] 4.5[-2] 10[-7.5] 12[-9.5] 5 5.5 9 10 5 5.5 9 10 7 6 11.5 13.5 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5

Parallel Style Air Gripper Series MHZ

) IC circuit 5 V, 12 V 3-wire (PNP) Solid state switch 12 V 2-wire Relay, PLC 24 V Grommet Yes 3-wire (NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V 3-wire (PNP) 2-wire 12 V Solid state auto switches marked with are produced upon receipt of order.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

C95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !