m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
The tightening torque of the M3 mounting screw should be 0.8 to 1.4 Nm. Unit: Operating range [mm] Series Bore size Auto switch model 20 25 32 40 50 63 HYQ HYC HYG 7.5 7.5 7.5 7.5 7.5 7.5 7.5 7.5 8 6 7 7 7 7.5 7.5 7.5 Rail D-F6 Note) Since this is a guideline including hysteresis, it is not meant to be guaranteed.
Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) Install the product (with bracket) using the M3 screws (4 pcs.). Bracket thickness is approximately 1.2 mm. Refer to the dimension drawing of the bracket (page 99) for mounting hole dimensions.
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2 FLOW CONTROL W/QUICK EXHAUST. SPEED EXHAUST CONTROLLER. 73.00000 lb. SVD.
Available in thread sizes from M3 to 1/2 in both inch (NPT) and metric R(PT) and with tube sizes from 3.2mm to 12mm OD (metric) and 1/8 to 1/2 OD (inch) and with optional elbow and universal style (increased flexibility) and meter-in and meter-out, these speed controls are designed to meet most applications.
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2 FLOW CONTROL W/CHECK VALVE. SPEED CONTROLLER WITH PILOT CHECK VALVE. 292.00000 lb. SVD.
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2 FLOW CONTROL W/CHECK VALVE. SPEED CONTROLLER WITH PILOT CHECK VALVE. 292.00000 lb. SVD.
Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10 N M3 x 0.5 x 30l or more 3 24.5 N M5 x 0.8 x 40l or more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap 2. Manual release lock type Push the M/O knob and turn it 90 counterclockwise.
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 6 (12VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket)
0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 2000 4000 6000 0 0 0 200 400 600 800 1000 1000 2000 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) VH600 Effective area S = 194 mm2 Supply pressure MPa Supply pressure MPa 0.7 0.7 Valve output pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 0 5 10 15 Flow rate (m3
Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) Install the product (with bracket) using the M3 screws (4 pcs.). Bracket thickness is approximately 1.2 mm. Refer to the dimension drawing of the bracket (page 71) for mounting hole dimensions.
20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3
Purge air flow rate (L/min [ANR]) 180 Existing model 160 Reduction ratio 140 31% IDG50A New New 120 Purge air flow rate (rated conditions) 100 80 Model Purge air flow rate Purge ratio Running cost 60 (L/min [ANR]) (%) (yen/year) 40 46,440 15 86 IDG50A New New 0 Existing model 67,500 20 125 0.0 0.5 1.0 [Calculation conditions] Air unit price: 3 yen/m3 Operating hours: 12 hours/day Annual operating
Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 x 0.45 x 25 l M3 x 0.5 x 30 l M5 x 0.8 x 40 l Stroke (mm) 2 3 3 Pulling force 4.9 N 10 N 24.5 N e Release lock when mounting or adjusting the cylinder. Remove bolt under normal operations. It may cause malfunction of locking and release.
Pulling force (N) Stroke (mm) Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Rubber cap Thread size M2.5 x 0.45 x 25 l or more 2 4.9 M3 x 0.5 x 30 l or more 3 10 M5 x 0.8 x 40 l or more 3 24.5 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Manual release, Lock type While pushing the M/O knob, turn it 90 counterclockwise.