Stations: 07, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: -

Stations: 07, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: Individual Wiring Specification, Option: D [w/Common Release Pressure Supply (PD) Port], Manifold Assembly, Delivery Condition: -

Stations: 07, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: D-sub Connector, 25 Pins, Option: None, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 07, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: N [No Wiring, (No Valve)], Option: None, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Body Size: 3 (3/8), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: N (NPT), Port Size: 03 (3/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FSG, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP).High purity, compact type with integral fittings, Mounting base dimensions conform to SEMI standard F65-1101 (Except for LVD10), New PFA body, Piping from 4 directions are possible, Variety of tubing sizes available, Air operated chemical valve, HIGH PURITY CHEMICAL VALVE, AIR OPERATED

The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP).High purity, compact type with integral fittings, Mounting base dimensions conform to SEMI standard F65-1101 (Except for LVD10), New PFA body, Piping from 4 directions are possible, Variety of tubing sizes available, Air operated chemical valve, HIGH PURITY CHEMICAL VALVE, AIR OPERATED

The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP).High purity, compact type with integral fittings, Mounting base dimensions conform to SEMI standard F65-1101 (Except for LVD10), New PFA body, Piping from 4 directions are possible, Variety of tubing sizes available, Air operated chemical valve, HIGH PURITY CHEMICAL VALVE, AIR OPERATED

Manifold Mounting: A (Direct Mount), Regulator Block Stations: 3 Stations, IN/OUT Piping Position: 07 [IN/ø6 (Straight) - OUT/ø4 (Straight)], Accessory: A (w/Pressure Gauge), Options: 1 (0.35 MPa Setting), Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

Manifold Mounting: B (DIN Rail Mount), Regulator Block Stations: 2 Stations, IN/OUT Piping Position: 07 [IN/ø6 (Straight) - OUT/ø4 (Straight)], Accessory: A (w/Pressure Gauge), Options: 2 (Non-Relieving), Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

Manifold Mounting: A (Direct Mount), Regulator Block Stations: 4 Stations, IN/OUT Piping Position: 07 [IN/ø6 (Straight) - OUT/ø4 (Straight)], Accessory: A (w/Pressure Gauge), Options: 1 (0.35 MPa Setting), Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FSG, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FSG, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: 02 (1/4), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Body Size: 2 (1/8, 14), Type: 3 (Universal), Control Type: 1 (Meter-in), Model: 1FS, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 1 (Meter-in), Model: 1FS, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: S (with Sealant)