XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Electric Actuator / Guide rod Slider

100 100 900mm 1000mm 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 Overhang direction:L3[mm] Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or

Modular Type Regulator Series AR

Proof pressure Maximum operating pressure Set pressure range 5 to 60C (with no freezing) Material Rubber parts FPM Ambient and fluid temperature Main metal parts Applicable models Applicable models Model Model AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 1/4, 3/8, 1/2 1/4, 3/8, 1/2 Port size Port

48

8 Motor cable (2 x 5) With switch rail ( ) +0.030 0 4 H9 depth 4 20 Auto switch mounting position 20 (48) 5 16.1 65 (4.2) 110.8 115 3.45 38.5 40 6 Cable length 300 45 (115) 7.6 4 x M5 x 0.8 thread depth 8 ( ) +0.030 0 4 H9 depth 4 50 Auto switch groove 4 x 6.6 2 x 16 E Note) The lower groove of the switch rail is not for auto switches.

SYA3000/5000/7000

48.1 SYJA 51.6 38.1 2 x M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) VFRA 42 VA (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 SYA7 20-02-F2) 3 4 5 (49.5) (42.5) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 Parts included 13 Gasket 1 13 Gasket 1 13 Gasket 1 13 Gasket 1 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 Description Size 70

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

) (n = 2, 3, 4, 5) D-A9mV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) Band mounting D-C7m D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5

Rotary Cylinder Series MRQ

2 !3 !4 !5 !6 !7 !8 !

ITV

Solenoid valve EXH 12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications

SMC Pneumatic Clean Series

3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6

LFE-OMY0008

HYS WIN ACCUMU PLS 2. 2. 2. 2. 2_P/2_N(37 ) 3. 3. 3. 3. Add/dEC P1AH/n2AH P1dH/n1dH (39 ) P2L/n2L P2H/n2H/H2 (38 ) P_2/n_2/H_2 (38 ) 4. 4. 4. 4. [F 2] OUT2 36 No.LFE*-OMY0008 1. 1. 1. 1. [F 2] [oUt2] OUT2 [-] 2. 2. 2. 2. (ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4.

IDX-OM-W038

WEB IDF-S0001 1 C32FP-260S 1 IDF-S1932 1 2 44 IDH Series 4.1 IDX-OM-W038 4 4.2.4 2 4 x 40 x 72 (1) 1.4 (5)( ,) 2.O 3.O 4. 5. 6.4 7. 1 1 OUT IN 4 4 3 3 2 2 5 5 6 IDH*4 IDH*6 1 2 AMH-EL350 3 AMH-EL250 4 O 5 AM-CA250C-D E AM-CA250C-C AM-CA350C-D E AM-CA350C-C 6 45 IDH Series 4.2 IDX-OM-W038 4 (2) 1.4 (5)( ,) 2.O 3.O 4. 5. 6.4 7. 1 1 IN OUT 4 4 3 3 2 2 5 5 IDH*4

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

2 !3 !4 !5 !6 !7 !8 !

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

SI Unit for Vacuum Manifold

Process data size Vacuum manifold stations Input process data Output process data 4 4 byte 2 byte 8 5 byte 3 byte 12 6 byte 4 byte 16 7 byte 5 byte 4.1. Input process data Table 4-2.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @4 #3 #0 #4 $0 #9 @5 #2 w @6 @3 u e !6 !5 !1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

IDX-OM-P026E

.2 2 2. 2. 1 Environment.2 2 2. 2. 2 Fixing of product .2 3 2. 2. 3 Pneumatic piping .2 4 2. 2. 4 Draining piping.2 4 2. 2. 5 Electric wiring.2 5 2 . 3 Reinstallation of the product .2 7 Chapter 3 Start and stop 3 . 1 Before starting .3 1 3 . 2 Start.3 1 3 . 3 Stop.3 2 3 . 4 Precautions for restarting operation .3 2 3 . 5 Check items after starting .3 2 3 . 6 Signal output .3 2 Chapter 4

3 Port Solenoid Valve/

/4" [2(A) port] Should be normally open.

IDX-OM-W037

IDH Series 4.2 Periodical Maintenance 4 2 IDX-OM-W037 Thermo-dryer 4.