Part Number Description: SUBPLATE ISO1 1/4PT Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-A02Side1/43/8
Part Number Description: SUBPLATE ISO1 3/8PT Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-A03Side3/83/8
Part Number Description: SUBPLATE ISO1 Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-A03Side3/83/8
Part Number Description: SUBPLATE ISO1 1/4PT Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-A02Side1/43/8
Part Number Description: SUBPLATE ISO1 1/4PT Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-A02Side1/43/8
Part Number Description: SUBPLATE ISO1 3/8PT Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-B02Bottom1/43/8
Part Number Description: SUBPLATE ISO1 Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-B02Bottom1/43/8
Part Number Description: SUBPLATE ISO1 Product Line: V Product Line Description: VALVE Family Code: 263 Family Description: VS7-6 SOL VALVE 4/5 PORT Class Code: 22 Part Code: 2 Reference Code: H Click here to report information errorImage shown may not match exact part number, ModelPipingPort size P, A, BR1, R2VS7-1-B02Bottom1/43/8
port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.
V V V V V V V 8E V V V V V V V V V V 11E V V V V V V V V V V 15E1 V V V V V V V V V V 1 When multiple options are combined, indicate symbols in alphabetical order.
Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20
Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment
Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow
Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K (Operation Manual,
Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K
Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: Y (w/o Operation Manual, w/o