80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Modular F.R.L. Unit

With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B 107 160 214 251 255 B B AC10A AC20A AC30A AC40A 208 246 249 234 272 275 209 247 250 AC40A-06 6 F.R.L.

Modular Type Lubricator Series AL

268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Ambient and fluid temperature Piston speed Cushion Thread tolerance JIS class 2 +0.8 0 +1.0 0 +1.25 0 +1.4 0 +1.8 0 to 100mm mm, 100 to 250mm mm, 250 to 630mm mm 630 to 1000mm mm, 1000 to 1200mm mm Stroke length tolerance Basic type (B), Axial foot type (L), Front flange type (F), Rear flange type (G), Single clevis type (C), Double clevis type (D), Center trunnion type (T), Front trunnion

Modular Type Filter Regulator Series AW

55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting B With drain guide B Metal bowl B 107 160 214 251 255 Metal bowl with level gauge Model B AW10 AW20 AW30 AW40 AW40-06 234 272 275 209 247 250

Solid State Vacuum Regulator Series ITV2090/2091

or less Current type Input impedance Approx. 6.5k Voltage type VAC OUT Tank Approx. 2.7k Preset input ITV2090 1 to 5VDC (load impedance: 1 k or more) Set pressure (Vacuum) Vacuum pump, Ejector Analog output 4 to 20mA (sink type) (load impedance: 250 or less) Output signal Note 3) (Monitor output) NPN open collector output: Max. 30V, 30mA Switch output PNP open collector output: Max. 30mA

Swivels

1 1-1/4 1-1/2 2 Maximum Rated Pressure (PSI) 5000 5000 5000 5000 4000 4000 4000 3000 Except the following port options in the noted size 03 (Male JIC 37) 3000 2000 05 (Male SAE O-Ring Boss) 2500 06 (Female JIC 37) 90 Housing Port 4000 3000 3000 2500 2000 06 (Female JIC 37) In-Line Housing Port 3000 2000 07 (Female NPSM) 4600 3000 2600 2100 1650 1500 Temperature Range (std seals) -40 to 250

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12 248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5

Multistage Ejector Series ZL

Multistage Ejector Series ZL112/212 Energy saving, large flow rate, 3 stage diffuser construction Series ZL112/212 Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) 1 stage performance Maximum suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure Q1 Q2 Q3 ZL112 100 200 ZL212 63 126 Q1 Q2 Q3

High Purity Chemical Valve

Breathing port: R H G C SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n x A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 Dimensions (mm) 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156 203 250

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)