Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

JXCx-OMY0004

Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-5 5-5 HRX-OM-X010 Chapter 5 System Operation 5.3.3 Status screen 2 POWER ON 2 1 3 4 Figure 5-5 Status screen 2 Table 5-4 Status screen 2 No.

JXCx-OMY0006

Safety Instructions 5 2.

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

JXCx-OMU0004

LED *3 ON/OFF ,, 3 L L *4 RESET STOP ON M24V7 LEF a b 45 No.JXC-OMU0004-A 9. () 9.1 .121 53 97 (1) (4) (2) No.1 NO.1 No.2 NO.2 (3) (1) (2) 1 9 7 (3) 1 2 9 7 (4) 2 1 5 3 *1 PLC I/O (2) (3) (4) (1) NO.2 NO.1 NO.1 No.1 No.2 No.1 [1] ONALARM ON OFF ON IN0 [2] ALARM ON IN03 bit_0 ON(1) IN1 ON OFF [3] BUSY ON [4] BUSY ON IN03 bit_1 IN2 ON OFF OFF IN2 [5] BUSY OFF bit_2

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Safety Instructions . 5 2.

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Fieldbus system CC-Link compatible SI unit

AI9 AO9 1 1 AI6 AO9 2 AI10 AO10 2 AI7 AO10 2nd division 3 AI11 AO11 3 AI8 AO11 Station I79..I64 O79..O64 0 AI12 AO12 Station I79..I64 O79..O64 0 AI9 AO12 2 I95..I80 O95..O80 1 AI13 AO13 2 I95..I80 O95..O80 1 AI10 AO13 2 AI14 AO14 2 AI11 AO14 3 AI15 AO15 3 AI12 AO15 . .

High performance type Step Motor Controller (Servo/24 VDC)

Safety Instructions 4 2.

Step Motor Controller (Servo / 24 VDC)

Safety Instructions . 4 2.

Servo Motor Controller (24 VDC)

(Step No. 2) 1.

IDX-OM-X004

/ Compliance Requirements . i 5 Chapter 1 Name of each Parts 1 1 Name of each Parts . 1 1 Chapter 2 Transportation / Installation 2 1 Transportation . 2 1 2 2 Installation . 2 1 2 2 1 Location . 2 1 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Electric wiring . 2 3 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

High Power Cylinder Series RHC

In-line type 0.1 0.3 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS421F (26) AS431F (24) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS420 (102

Cylinder with Turntable Series MGT

2 !3 @2 @1 @5 !1 !0 Section AA @0 u @8 r y !6 @3 @4 e !7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.

PSE530/200

Use a new sensor connector in case wiring or the snapping of A into B are done incorrectly. 2-M3 x 8L Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely.