Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10 How to Order LEPY 10 K 50 1 1 R 6N q w e r t y u i o !

In-line Air Filter ZFC Series

ZFC1 ZFC3 ZFC5 ZFC7 1 2 V 2 3.2 V V 3 4 V V 4 6 V V 5 8 V 6 10 V 7 12 V Option Nil None B With bracket Inch size A 1/8" V V B 5/32" V V D 1/4" V V E 5/16" V F 3/8" V Max. Operating Pressure and Operating Temperature Specications Model ZFC1l ZFC3l ZFC5l ZFC7l Max. operating pressure [MPa] 1.0 Port size (Applicable tubing O.D.)

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Branch tee LQ1B P.10 6 1 2 3 Female 4 5 P.11 6 1 2 3 Union elbow LQ1E 4 5 P.12 6 1 2 3 Union tee LQ1T 4 5 P.13 6 1 2 3 Panel mount union LQ1P 4 5 P.14 6 1 2 3 Union LQ1U 4 5 P.15 6 4 Union flange LQ1F 5 P.15 6 Note) Basic size With reducer Features

New

D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Directional Control Driver for Electric Cylinder

Product Specifications Model LC3F212-5A3 LC3F212-5A5 24 VDC 10% Power supply voltage Max. 1.3 A Max. 2.3 A Front side label color Gray Blue Input signal Photocoupler input 24 VDC 10% Max. 8 mA/point Selction of thrust 100% or set value (setting range 10 to 70% F.S.)

EX260-SEC-A_eng

Fieldbus interface connector layout 6 RUN L/A IN L/A OUT PWR(V) PWR BUS OUT: M12 4-pole Socket D-coded 1 No.

EX260-SPN-A_eng

Valve manifold Accessories Side D NOTE (SI unit side) Replacement of the SI unit Remove the M3 hexagon screws from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats

Quick Exhaust Valve Series AQ 1

Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8

Pneumatic Purification

Suite D Poway, CA 92064 Tel: (858) 679-1903 Fax: (858) 679 1904 SMC Pneumatics Inc. (Indianapolis) 3011 N Franklin Road Indianapolis, IN 46226 Tel: (317) 899 4440 Fax: (317) 898 4808 SMC Pneumatics Inc. (Boston) Zero Centennial Drive Peabody, MA 01960 Tel: (978) 326 3600 Fax: (978) 326 3700 SMC Pneumatics Inc.

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP 2 5 4 5 Z R D 1 03 M X536 VP 4 1 X538 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20* 2 xed

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f Light/ surge voltage suppressor Nil None V V V V Z With light/surge voltage suppressor v*

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Double acting D Applicable Auto Switch/Refer to pages 761 to 809 for further information on auto switches.

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 2) Valve size 1 to 4 10 5 6 Note 2) Note) B: Slotted locking type B (tool required) 7 Note 2) 2 15 Note 1) CE-compliant: For D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 3 20 25

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ VP Conduit terminal

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

connector) kit (Flat ribbon cable) 25 pins 26 pins IP40 compliant IP40 compliant FD0 FD1 FD2 FD3 PD0 PD1 PD2 PD3 Flat ribbon cable (26P) without cable Flat ribbon cable (26P) with 1.5 m cable Flat ribbon cable (26P) with 3.0 m cable Flat ribbon cable (26P) with 5.0 m cable D-sub connector (25P) without cable D-sub connector (25P) with 1.5 m cable D-sub connector (25P) with 3.0 m cable D-sub

3-Port Solenoid Valve Modular Type/ Residual Pressure Relief Valve

It is not interchangeable with the D type DIN connector with a 9.4 mm pitch between terminals. To distinguish it from the D type DIN connector, N is listed at the end of voltage symbol. The dimensions are the same as those of the D type DIN connector. When locking the manual override with the push-turn locking type, be sure to push it down before turning.

EX600-WEN_WSV.eng

Link, No Activity (10 Mbps) Specification Str Frunzei 29, Sector 2, Bucharest, Romania Orange LED flashes. Link, Activity (10 Mbps) LINK/ACT2 100 Mbps: Green 10 Mbps: Orange Red LED is ON. IP address has been duplicated. EtherNet/IPTM is not connected.

Flow sensor

D: Contents revised in several places. E: Contents revised in several places. [September 2016] F: Contents revised in several places.