ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

Multistage Ejector Series ZL112/212 1

(kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

Return Filter FH100 Series

DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

AMX-OM-Q018E

Standard dew point -20oC, -15oC : about 10 min.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Copper-free Actuators

, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

α PneuAlpha HARDWARE MANUAL

-57 Hz: 0.075 mm Constant Amplitude 57-150 Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) 9 PneuAlpha Hardware Specification 2 Table 2.8:Environmental and Electrical Specications Insulation Resistance

Bacteria Removal Filter

SF-OMZ0013-B 2.

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

Process Pump

The fluid in pump chamber A is forced out to the discharge port, and the fluid is sucked into pump Air supply (AIR SUP) 5 port solenoid valves P2 P1 Discharge port (FLUID OUT) Pump chamber A Pump chamber B Check valve Shaft Suction port (FLUID IN) Diaphragm A Diaphragm B Drive chamber A Drive chamber B chamber B from the suction port. 4.

ASx-OMT0060

Name Material Remark 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Handle POM 4 Needle POM 5 End cover Brass Electroless nickel plating 6 Spring Steel wire 7 U-seal HNBR 8 O-ring NBR 9 Needle O-ring NBR 10 Y seal NBR 11 Seal for fitting NBR 12 Cassette 13 Stator POM 14 Valve O-ring HNBR 15 Shaft O-ring NBR 16 Seal NBR For G thread only. 10 - AS*2Q R thread / NPT thread type G thread

Pneumatic Purification

Mist Separator : Series AM Standard features on all models MODEL FLOW PORT A B C WEIGHT ELEMENT D NPT in in in lb (cfm) in Die-cast Aluminum with chromate treatment No screw threads or tie rods are required therefore removal and replacement of element is made quick and easy Differential Pressure indicator Internal autodrain Built-in push-to-connect fitting on drain AM150-N02C-T 10 1/

VY511, VYU5

VE System A System B START VY RUN START G AL Analog voltage input 0 to 10V PLC START Robot support (External input operation) RUN START After both systems A and B have been auto balanced, an operation command is input to the controller to operate the cylinder. At the point at which the auto switch for stopping has been tripped, systems A and B are stopped to assemble parts.

Large Capacity Compressed Air Filters Series AFW

Specification A B Flange Size ANSI ISO# 3 Max. Working Pressure No. of Elements Flow Rate (SCFM) Weight lb Dimensions Element 1) Filter 1) Max.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Type Rubber bumper, 20 to 100 Air cushion, 40 to 63 N A Nil Built-in magnet Clean series 10 11 Relief type Vacuum suction type No D With auto switch (Built-in magnet) Bore size (mm) 10 C D G 1 B N 40 150 Z M9BW 21 C D G 1 B N 40 150 Z M9BW Mounting Cylinder stroke (mm) B Auto switch Number of auto switches Basic Axial foot Rod

VHK

Bracket mounting dimensions B S (Width across flats) O. D.