Compact Cylinder

D Bore size (mm) A Piping port (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 25 B D 32 View from piston rod end 40 (2) (2) (2) (2) (2) (2) C 50 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Range

TABLE OF CONTENTS

/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8

3 Port Solenoid Valve Rubber Seal Series SY100 1

For lead wire length: 2000 mm SY114-5LOZ-M3 SY100-68-A-20 2> For lead wire length: 300 mm (Standard) SY114-5LPZ-M3 Z N R Coil (~) Symbol of connector assembly with protective cover No part numbers of connector assembly with cover are needed to be indicated in this case.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

OFF n-1 n-2 Error correction Real-time flow rate Window comparator mode H : Hysteresis For PF2D300/301 Note 2) "n" H H LED display Contents Solution ON Check the load and the wiring for OUT1. A current of more than 80 mA is flowing to OUT1. NO OFF n-2 n-1 Real-time flow rate Check the load and the wiring for OUT2. A current of more than 80 mA is flowing to OUT2.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

CE2

2 pcs. 1 pc. n pcs.

Compact Electric Actuator Series LG1

direct acting guide Series Stroke 20 21 Without coupling With coupling (Refer to Table 1 below for applications.) 100 200 300 400 500 600 700 800 900 1000 1200 100mm 200mm 300mm 400mm 500mm 600mm 700mm 800mm 900mm 1000mm 1200mm Motor output 2 100W Power supply voltage 1 2 100/110VAC 50/60Hz 200/220VAC 50/60Hz Feed screw type (Refer to Table 1 below for applications) P N S Ground ball screw

LEC-OM02904

MO1 1 1 LG 2 14 MO2 2 LE-CSS(6)SSCNET () SD 6 SSCNET CN1A SW1 2m 2m SW1 (8) SW2 CN1B 2 1 (1) MR-J3-B LECSS (2) (7) 2 SW1 CN1A (8) SW2 CN1B 2 1 LE-CSSMR-J3-B LECSS (3) (7) 3 (6) SSCNET () 6 SSCNET SW1 CN1A SW2 (8) CN1B 2 1 MR-J3-B LECSS (n) (7) n SW1 CN1A 9 (9) SW2 (8) CN1B 2 1 3 7 3 1.

VQ1000V-OMV0001

VVQ1000-51A-N7 5/16" VVQ1000-51A-N9 DIN DIN DIN DIN C S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

90 5 90 10 180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) 5 to 60C Ambient and fluid temperature 0.15 to 0.7 0.2 to 0.7 0.15 to 1.0 Operating pressure range (MPa) Rotation time adjustment range (sec/90) 0.07 to 0.3 Allowable radial load 40 N 50 N 60 N 20 N 30 N 60 N 80 N 15 N Shaft load Allowable thrust load 2 15 N 30 N 40 N 10 N Allowable

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Fp: Generated extension force of cylinder (N) Fp: Generated retraction force of cylinder (N) Ff: Theoretical extension output (N) Ff: Theoretical retraction output (N) P: Operating pressure (MPa) D: Bore size (mm) d: Piston rod diameter (mm) 1: Cylinder extension load pressure coefficient 2: Cylinder retraction load pressure coefficient Formula (1) Formula (2) Fp = 1 x Ff Fp = 2 x Ff 4

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Multistage Ejector (N)ZL Series

59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36 (N)ZL112-E (ZSE4) (N)ZL112-EB (ZSE4B) (N)ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 8 Multistage Ejector Series (N)ZL Dimensions (mm) / Series (N)ZL112 (with Valve) 1in = 25.4mm Scale: 40% With supply valve and release valve (N)ZL112-K1L-E25 (L) P 2-5.4 Mounting hole 13.5 50

MGC

Diagnostic indicaiton (2 color) Yes Relay PLC 24V 12V 2 wire Water resistant (2 color) With timer Grommet 3 wire(NPN) IC 5V, 12V G59F With diagnostic output (2 color) 4 wire(NPN) Latch with dianostic output (2 color) H7LF *Lead wire length 0.5m (Example) B80C 5m Z (Example) B80CZ 3m Z (Example) B80CL N (Example) B80CN * : Manufactured upon receipt of order Stroke Long stroke (mm) Standard

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting)

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread: T (NPTF

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: N7 (1/4" One-touch

Type, A,B Port Size: N7 (ø1/4" One-touch Fitting), Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting Option: B (Mounting Screw, Hexagon Socket Head Cap Screw)