Magnet: Built-in, Mounting: Through Hole [Standard], Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: Rubber Bumper, Auto Switch Groove: Auto Switch Mounting Grooves, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Mounting: Through Hole [Standard], Bore Size: 80mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: Rubber Bumper, Auto Switch Groove: Auto Switch Mounting Grooves, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Mounting: Both Ends Tapped, Bore Size: 50mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: Rubber Bumper, Auto Switch Groove: Auto Switch Mounting Grooves, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -52No.EX-OMV0017 (e).

SI unit for Ethernet POWERLINK

SI unit SI unit Refer to fault malfunction ST LED is OFF No.1 SI unit Refer to fault PWR (V) LED is OFF No.2 Yes No SI unit Refer to fault L/A LED is OFF No.3 SI unit Refer to fault ST LED is red ON No.4 SI unit Refer to fault No.5 S/E LED is red ON SI unit S/E LED Refer to fault is green flashing No.6 Group of valves Refer to fault not working No.7 All valves and Refer to fault valve LEDs

PFxx-OMJ0005CN

10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I

PF-OMM0004_C

[F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.

K35-OMX0029

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

K35-OMW0031

If Calibration is ON after setting the Operation mode to JOG, turn OFF the Calibration once and turn it ON again. 2-3 Emergency stop Emergency stop is performed by turning OFF the E-Stop off (Menu Tree No.1-3-5-4-1). Emergency stop is valid for all the setting of Operation mode (Menu Tree No.1-3-5-2).

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES