0.

Coil Varistor Light/surge voltage suppressor (YZ) +Locked position Coil PUSH LOCK Varistor With light (YZ) Precautions When operating with a screwdriver, turn it gently using a watchmakers screwdriver. (Torque: less than 0.1 NNm) Press and rotate to lock the manual operation of VQZ200/300. If rotate without pressing, manual breakage and air leakage could be occurred.

ISO Interface

Solenoid Subplate (NPTF) FHG 3-position, Closed center FJG 3-position, Exhaust center Without Subplate A02T Side 1/4 For VSR/S8-6 S Single D Double FIG 3-position, Pressure center A03T Side 3/8 For VSR/S8-6, 8-8 YHZ 3-position, Dual Closed center YIZ 3-position, Dual Pressure center A04T Side 1/2 For VSR/S8-68-8, 8-10 A06T Side 3/4 For VSR/S8-8, 8-10 YJZ 3-position, Dual Exhaust center YZ

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VZ (Except VQZ100) VQZ300 DIN terminal (Y) DIN terminal (YZ) Locking type (Tool required) VS VFN Except VQZ100 ) ( 3.2 4.1 Except VQZ100 ) ( 4-14-21 Base Mounted 22 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Slenoid Valve Precautions, refer to page 4-18-2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2.

Table of Contents

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Slotted) : Non-locking push style (Flush) VP 4 1 (P) 3 (R) VQ VQZ Body style 2 Body ported Electrical entry VZ G: Grommet (DC Specification) L: L plug connecor with lead wire M: M plug connecor with lead wire MO: M plug terminal without connector LO: L plug terminal without connector VS Function Symbol Specification DC AC (1.0W) (3) Standard (1) High pressure (Metal seal only) (1.0W) K YZ

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

Series VS

position A06T Side 3/4 For VSR/S8-8, 8-10 Number of Solenoid FHG 3-position, Closed center FJG 3-position, Exhaust center A10T Side 1 For VSR/S8-10 B02T Bottom 1/4For VSR/S8-6 B03T Bottom 3/8For VSR/S8-8 B04T Bottom 1/2For VSR/S8-10 S Single D Double FIG 3-position, Pressure center YHZ 3-position, Dual Closed center YIZ 3-position, Dual Pressure center * * YJZ 3-position, Dual Exhaust center YZ

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

suppressor VZ 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VF Non-locking push style (Flush) VQZ3000 5 (R1) 1 (P) 3 (R2) VFR (Standard) 12V DC 24V DC 3 Position pressure center 0.7 0.9 Body Ported L plug connector (L) (A) 4 (B) 2 VP7 1 (P) 3 (R2) 5 (R1) M plug connector (M) M plug connector (M) (Option) 100V AC 200V AC 110V AC 220V AC VP4 VQZ1000 0.15 0.3 (A) 4 VQ DIN connector (YZ

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Position exhaust center L plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ

VQZ1000/2000/3000

Y: DIN terminal (1) YO: DIN terminal (1) without connector YZ: DIN terminal (1) YOS: DIN terminal (1) without connector YS: DIN terminal (1) Body 5 Base mounted With surge voltage suppressor With surge voltage suppressor With light/ surge voltage suppressor Seal 0 1 Metal seal Rubber seal Note 1) Applicable to VQZ2000 and 3000.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Coil Varistor Light/surge voltage suppressor (YZ) Locked position +Coil PUSH LOCK Varistor With light (YZ) Coil Varistor Precautions When operating with a screwdriver, turn it gently using a watchmakers screwdriver.

VQZ Series

With light (YZ) Note) Surge voltage suppressor of varistor has residual voltage corresponding to the protective element and rated voltage ; therefore, protect the controller side from the surge voltage. The residual voltage of the diode is approximately 1V. Caution Connection of Lead Wire Not necessary if ordering the lead wire pre-connected model.

VFR

Y YZ DIN terminal (DIN43650B type) 3-5-54 55 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR4000 Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

Soft Start-up Valve

DIN Terminal With light/surge voltage suppressor (DZ, YZ) DIN terminal has no polarity M12 Connector With light/surge voltage suppressor (WOZ) Connect correctly the lead wires to + (positive) and (negative) indications on the connector.

V

A N U A L O V E R R I D E Non Locking Push Type (Tool Type) B Slotted Locking Type (Tool Type) 5 Base Mounted B O D Y T Y P E E L E C T R I C A L E N T R Y L L Type Plug Connector with Lead Wire LO L Type Plug Terminal without Connector M M Type Plug Connector with Lead Wire MO M Type Plug Terminal without Connector Y DIN Connector (VQZ200/300) YO Terminal without Connector (VQZ200/300) YZ

HEC-OM-Y008

Dec Z yZ ZZ AZ BZ CZ DZ . 400 400 This manual provides the following symbols in addition to Danger, 300 300 This unit does not use parts that meet the SCCR specifications.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Y YZ DIN terminal (DIN43650B type) 1275 Series VFR4000 Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation