10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)1 to 5 V ?

10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)1 to 5 V ?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

CE

No.CE*-OMI0063-C / / CE1* Series 1. 16 2. 7 2-1. 7 2-2. 78 2-2-1. 7 2-2-2. 8 2-2-3. 8 2-3. 9 3. 3-1. 10 3-2. 10 3-3. 11 3-3-1. 11 3-3-2. 11 3-3-3. 11 4. 4-1. 12 4-2. 12 4-3. 12 5. 5-1. 13 5-2. 14 5-3. 14 6. 6-1. 1516 6-2. 16 CE1B12 17 CE1B20 18 CE1B32 19 CE1B40 20 CE1B50 21 CE1B63 22 CE1 Series/ 1. 1) (ISO/IEC)(JIS) 2) *1) ISO

Related Products: Multi-tube Holder TM Series

(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.

VER2000/4000

5 !6 q w e r t y u i Block packing !

PF3A7xxH-L.eng

V or 0 to 10 V can be selected when the analogue voltage output type is used.

Compact and

10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 16 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] ZU07SA Exhaust Characteristics Exhaust Characteristics Flow Rate Characteristics Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum pressure Vacuum

PSE57  Series Pressure Sensor for General Fluids

Temperature characteristics (25C reference) 2%F.S. (0 to 50C) 3%F.S. (10 to 60C) 3% F.S. (0 to 50C) 4% F.S. (10 to 60C) 5% F.S. (10 to 60C) Accuracy Enclosure IP65 Withstand voltage 500 VAC for 1 minute between terminals and housing Insulation resistance 100 M or more (500 VDC measured via megohmmeter) between terminals and housing Operating temperature range Operating: 10 to 60C, Stored:

EX600-SPRA_eng

Address 8 7 9 6 125 100 99 0 5 1 : : 4 1 Pin number 2 3 5 3 1 4 2 (2) (3) SI unit output data size 4 byte (default setting) Signal name RXD/TXD-N RXD/TXD-P Shield NC NC 1 byte 2 byte 3 byte End plate bracket (EX600-ZMA2) 5 Refer to the product catalogue or SMC website (URL http://www.smcworld.com) to obtain more detailed information about outline dimensions.

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight