Air Cylinder

15 30 Note 1) 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM2 D-M9lV 5 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CM3 D-A9lV 5 15 25 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9lWV D-M9lAV 10 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 D-C7l D-C80

ISO Cylinder

+ 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C D-M9lV D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

HRX-OM-W060

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Never change parameters for manufacturer setting. 5 2 5. PARAMETERS 5.1.1 Parameter list No.

Table of Contents

Refer to page 2 and 8. Refer to page 5 and 8. 4 Model determination Refer to page 2. Refer to page 5. 5 Selecting accessories sold separately.

Fieldbus System

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8:

VM

2 !3 !4 !5 !6 !7 !8 !

HRX-OM-R005

1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz 9.5.1 HRS060-A-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 1500 e e 40 40 32 32 1000 1000

HRX-OM-R016

. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection monitor menu . 5-9 5.5.2 Checking of the Inspection monitor menu . 5-9 5.6 Key-lock

Fieldbus system EtherNet/IP compatible SI Unit

5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 0: offset binary 1: signed magnitude 2: 2s complement 6..7 Data format Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6:

HRX-OM-W038

. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection monitor menu . 5-9 5.5.2 Checking of the Inspection monitor menu . 5-9 5.6 Key-lock

Electric Actuator with Integrated Guide

8 4-M5 x 0.8 E D Proximity sensor Photo micro sensor (2 x n1)-5.5, Drill through 11.5, counter bore depth 5 2 5 14.8 21.5 thread depth 4 4-M2 x 0.4 12 (Groove depth 1) 5 Section AA (Sensor mounting dimensions) (20.5) Stroke + 66 (Table movement range) 82.5 PCD3 40 40 2 x n2-M2.6 x 0.45 thread depth 4.5 (Same pos. on opposite) 4-C3 11.5 A 42.5 32.5 5 4 1 8 Courtesy of Steven Engineering,

HRX-OM-X071

4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu .

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

HRX-OM-X010

See 5.3.16 Initial Setting screen 1 (page 5-19) for details. HRZ Series 5.3 Operation Screen 5-5 5-5 HRX-OM-X010 Chapter 5 System Operation 5.3.3 Status screen 2 POWER ON 2 1 3 4 Figure 5-5 Status screen 2 Table 5-4 Status screen 2 No.

HRX-OM-O021

. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection monitor menu . 5-9 5.5.2 Checking of the Inspection monitor menu . 5-9 5.6 Key-lock

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

DOC1001322

-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRS400-A-46(Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

CV/MVGQ

2 !3 !4 !5 !6 !7 !8 !