3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

Fieldbus System

798 810.5 810.5 823 835.5 848 860.5 53 5 Port Solenoid Valve Series VQC1000 EX600 Dimensions Power supply with 7/8 inch connector Series EX600 Series SY Series SV Series S0700 Series VQC L1 L2 (Rail mounting hole pitch: 12.5) (5.25) L4 L7 28 L6 5.5 8 26 47 Communication connector 1.5 1.5 Indicator light P = 10.5 (12) Marker groove Manual override B A B A B A B A B A A A 93.5 106 71 8 90 66

48

CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LECP6llD-l) (11.5) Refer to page 14 for L dimension and part number of DIN rail. (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) 15 Controller (Step data

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

Step Motor Controller (Servo / 24 VDC)

Troubleshooting. 66 3 - LECP6 Series / Controller 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Exhaust Cleaner for Clean Rooms AMP Series

80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Vacuum Ejector Series ZM

(mm) Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Model Standard supply pressure Diffuser construction S H M ZM05H ZM07H ZM10H ZM13H ZM07M ZM10M ZM13M ZM13S ZM15S 0.5 0.7 1.0 1.3 0.7 1.0 1.3 1.3 1.5 17 30 60 90 33 60 85 88 110 15 30 50 66 23 38 44 37 45 0.5 MPa Double diffuser 0.35 MPa Single diffuser 0.45 MPa JIS Symbol Vacuum Ejector Specifications Air supply

Dual Rod Cylinder Series CXSJ/CXS

103 46 40 10 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

High Power Cylinder Series RHC

H2 NN MM H1 NIf8 FY FW NC NE Width across flats KA 1.5 FT NF AL E E 10 10 N JC JD N FL A F K NA S + Stroke F H WH B FX ZZ + Stroke FZ (mm) A AL B D E F FL FD FT FX FY FW FZ GA GB H1 H2 Bore size (mm) 20 18 15.5 32 10 51 14.5 21 16 38 11.5 68 7 53.5 6 47.5 5 8 25 22 19.5 36 12 53 18 27 16 44 11.5 70 7 56.5 9 49.5 6 8 32 22 19.5 44 12 55 18 33 19 50 14.5 72 7 55 9 51.5 6 9 40 24 21 53 16 66

AC Servo Motor Driver (CC-Link Type)

-66- (2) Trigger Trigger is a condition which decides the display timing of the graph. If trigger conditions are not satisfied, waveform will not be displayed. Click of [Data] to set the condition. (In general, set the Motor speed.) (3) Level / Condition / Position are displayed. Click of Level / Condition to set the condition.

AC Servo Motor Driver (SSCNET /H Type)

Positioning operation (PLC) 62 9.1 Setting of Operation data . 62 9.2 Movement MOD . 66 10. Troubleshooting 67 10.1 Alarms and warning list . 67 10.2 Troubleshooting at power on . 73 10.3 Alarm Display. 74 -2- LECSS2-T Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LEC-OM069xx

Backlash compensation is applied when moving from TPOS0 to TPOS1, but not when moving from TPOS2 to TPOS1. 5-66 5 Adjustments When Servo is OFF Backlash compensation is not applied when the servo is OFF (i.e., when the servomotor is not powered). Therefore, the reference position POS moves by only the backlash compensation value.

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

SI Unit for Vacuum Manifold

Pressure P2 (Index 66) Table 3-11. Pressure P2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x02EE Energy saving operation threshold (P2) of CH0 Set energy saving operation threshold (P2) for each CH. Refer to Section 5.

ZQ-OM01401

No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6) 7 31 - No.ZQ-OM01401-B 9. 9.1 ZQA [] 5 to 50 () 2] 1) 20 [m/s 2] 2) 100 [m/s CE / UKCA (EMC RoHS ) 1) 10~150Hz X,Y,Z 2 () 2) X,Y,Z 3 () ZQ05A ZQ07A ZQ10A [mm] 0.5 0.7 1.0 [MPa] 0.35 0.43 1) -80 [kPa] 1) 5 10 22 [L/min (ANR) ] 1) 15 25 47 [L/min (ANR) ] (P) 0.3 to 0.5 2) 0 to 0.45 3) [MPa] (PD) [MPa] 0.75 8 6 4 65 68 70 4) () 64 66

IDX-OM-N030

point oC 10 Exhaust heat amount of unit kW 7.5 9.0 11.5 Power supply voltage (frequency) 3 phase AC380V (50Hz) specifications Electric Power consumption Note 4) kW 2.8 3.4 3.4 Running current A 5.1 6.3 6.3 Applicable ground fault circuit interrupter capacity (Sensitivity current: 30mA) Note 5) A 15 Refrigerant R407C (HFC) Refrigerant Charge Quantity g 125010 136010 200010 Sound level dB(A) 66

Line Filter

P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Mist Separator

P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Micro Mist Separator

P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.